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Optical Monitoring of Nanocrystalline Diamond with Reduced Non-diamond Contamination

Published online by Cambridge University Press:  31 January 2011

Zdenek Remes ,
Alexander Kromka ,
Tibor Izak ,
Adam Purkrt  and
Milan Vanecek
Zdenek Remes
Affiliation:
[email protected], Institute of Physics of the ASCR,v.v.i., Praha 6, Czech Republic
Alexander Kromka
Affiliation:
[email protected], Institute of Physics of the ASCR,v.v.i., Praha 6, Czech Republic
Tibor Izak
Affiliation:
[email protected], Institute of Physics of the ASCR,v.v.i., Praha 6, Czech Republic
Adam Purkrt
Affiliation:
[email protected]
Milan Vanecek
Affiliation:
[email protected], Institute of Physics of the ASCR,v.v.i., Praha 6, Czech Republic
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Abstract

Previously, the nanocrystalline grain boundaries were often contaminated by the “non-diamond phase” with the photo-ionization threshold at 0.8 eV. Here, we present the optical spectra of the NCD films grown on transparent substrates by the microwave plasma enhanced chemical vapor deposition (CVD) at a relatively low temperature below 600°C. The transmittance and reflectance spectra are useful to evaluate the film thickness, the surface roughness and the index of refraction. The direct measurement of the optical absorptance by the laser calorimetry and photothermal deflection spectroscopy (PDS) provides high sensitive methods to measure the weak optical absorption of thin films with rough surface. The optical measurements indicate the high optical transparency of our standard, nominally undoped 0.2-0.3 μm thick NCD film with low non-diamond content. However, the optical scattering is rather high in UV and needs to be reduced.

Keywords

diamondoptical propertiespolycrystal
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1203: Symposium J – Diamond Electronics and Bioelectronics-Fundamentals to Applications III , 2009 , 1203-J17-13
Copyright
Copyright © Materials Research Society 2010

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