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Optical Interconnect: Fully Embedded Etched Passive And Active Polyimide Waveguides And Devices

Published online by Cambridge University Press:  16 February 2011

Harry H. Fujimoto ,
Siddhartha Das ,
John F. Valley ,
Marc Stiller ,
Larry Dries ,
Dexter Girton ,
Tim Van Eck ,
Susan Ermer ,
Ed S. Binkley  and
Jim C. Nurse
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Harry H. Fujimoto
Affiliation:
Intel Corporation, 3065 Bowers Ave SC 1–03, Santa Clara, CA 95054
Siddhartha Das
Affiliation:
Intel Corporation, 3065 Bowers Ave SC 1–03, Santa Clara, CA 95054
John F. Valley
Affiliation:
Lockheed Palo Alto Research Laboratory, 3251 Hanover Street, Palo Alto, CA 94304
Marc Stiller*
Affiliation:
Lockheed Palo Alto Research Laboratory, 3251 Hanover Street, Palo Alto, CA 94304
Larry Dries
Affiliation:
Lockheed Palo Alto Research Laboratory, 3251 Hanover Street, Palo Alto, CA 94304
Dexter Girton
Affiliation:
Lockheed Palo Alto Research Laboratory, 3251 Hanover Street, Palo Alto, CA 94304
Tim Van Eck
Affiliation:
Lockheed Palo Alto Research Laboratory, 3251 Hanover Street, Palo Alto, CA 94304
Susan Ermer
Affiliation:
Lockheed Palo Alto Research Laboratory, 3251 Hanover Street, Palo Alto, CA 94304
Ed S. Binkley
Affiliation:
ROI Technologies, 3452 Cooper Dr, Santa Clara, CA 95051
Jim C. Nurse
Affiliation:
Lockheed Palo Alto Research Laboratory, 3251 Hanover Street, Palo Alto, CA 94304
John T. Kenney
Affiliation:
Lockheed Palo Alto Research Laboratory, 3251 Hanover Street, Palo Alto, CA 94304
*
* Currently with Optivsion, Palo CA
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Abstract

Electro-optic polymers are of great interest for inserting photonic elements into electronic systems. Recently Much progress has been made in both materials and processing. These polymers must have low optical loss, high mechanical integrity, low processing cost, and high temperature stability. In the first part of our talk, we present our work to produce etched single mode buried channel waveguides in an all polymide system. We have chosen polyimide because of its high temperature stability. Optical losses and waveguide characteristics are described as a function of waveguide width and index ofrefraction difference between core and cladding.

Mach Zehnder Modulators fabricated using a DCM-polymide core are also described The waveguide cores are etched and fully embedded in a polyimide cladding. The active arms of the modulator are poled using parallel plate poling. The electro-optic properties of the Mach Zehnder are described operating at 830nm. Photobleached DCM waveguides are also describe. A new high temperature chromophore is presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 328: Symposium Q – Electrical, Optical, and Magnetic Properties of Organic Solid State Materials , 1993 , 553
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

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