Hostname: page-component-78c5997874-8bhkd Total loading time: 0 Render date: 2024-11-03T08:43:54.195Z Has data issue: false hasContentIssue false
  • English
  • Français

Optical Characterization of Interface, Surface and Bulk Defects in A-Si:H

Published online by Cambridge University Press:  25 February 2011

P. D. Persans ,
D. Arnzen  and
G. E Possin
P. D. Persans
Affiliation:
Physics Department and Center for Integrated Electronics, Rensselaer Polytechnic Institute, Troy NY
D. Arnzen
Affiliation:
Physics Department and Center for Integrated Electronics, Rensselaer Polytechnic Institute, Troy NY
G. E Possin
Affiliation:
General Electric Company, Corporate Research and Development Center, Schenectady, NY
Get access

Abstract

We present a new analysis approach which combines photoconductivity and photother-mal deflection spectroscopies in a-Si:H thin films of various thicknesses to profile electronic defects.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 192: Symposium O – Amorphous Silicon Technology - 1990 , 1990 , 231
Copyright
Copyright © Materials Research Society 1990

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Jackson, W. and Amer, N., Appl. Phys. Lett., 42, 105, (1982).Google Scholar
Jackson, W., Amer, N., Boccara, A., and Fournier, D., Appl. Opt., 20, 1333, (1981).Google Scholar
3.) Jackson, W., Biegelson, D., Nemanich, R., and Knights, J. C., Appl. Phys. Lett., 42, 105, (1983).Google Scholar
4.) Curtins, and Favre, in “Amorphous Silicon and Related Materials”, ed. Fritzsche, H., (World Scientific, Singapore, 1989), p. 329.Google Scholar
5.) Frye, R. C., Kumler, J. J., and Wong, C. C., Appl. Phys. Lett., 50, 101, (1987).Google Scholar
6.) Grillo, G. and De Angeles, L., J. Non-Cryst. Sol., 114, 750, (1989).Google Scholar
7.) Fritzsche, H. in “Semiconductors and Semimetals, Vol. 21 B, (Academic, Orlando, 1986).Google Scholar
8.) Fritzsche, H., Solar Cells, 2, 289, (1980).Google Scholar
9.) Parsons, G. N., Kusano, C., and Lucovsky, G., J. Vac. Sci. Technol. A5, 1655, (1987).Google Scholar
10). Vanacek, M., Kocka, J., Stuchlik, J., Kozisek, Z., Stika, O., and Triska, A., Solar Energy Mat., 8, 411, (1983).Google Scholar
11.) Lee, S., Kumar, S., Wronski, C. R., and Maley, N., J. Non-Cryst. Sol., 114, 316, (1989).Google Scholar
12.) Smith, Z E., Chu, V., Shepard, K., Aljishi, S., Kolodzey, J. and Wagner, S., Appl. Phys. Lett., 50, 1521, (1987).Google Scholar
13.) Possin, G. E. and Wu, F. C., Mat. Res. Soc. Symp. Proa, Vol. 118, (1988).Google Scholar
14.) Persans, P. D., Phil. Mag. B, 46, 435, (1982).Google Scholar