Hostname: page-component-78c5997874-dh8gc Total loading time: 0 Render date: 2024-11-02T23:30:52.458Z Has data issue: false hasContentIssue false
  • English
  • Français

Novel Materials Synthesis Using an Intense Pulsed Ion Beam

Published online by Cambridge University Press:  25 February 2011

D. C. Gautier ,
R. E. Muenchausen ,
D. J. Rej ,
B. F. Roberts ,
G. Johnston  and
W. J. Waganarr
D. C. Gautier
Affiliation:
Los Alamos National Laboratory, Los Alamos, New Mexico 87545
R. E. Muenchausen
Affiliation:
Los Alamos National Laboratory, Los Alamos, New Mexico 87545
D. J. Rej
Affiliation:
Los Alamos National Laboratory, Los Alamos, New Mexico 87545
B. F. Roberts
Affiliation:
Los Alamos National Laboratory, Los Alamos, New Mexico 87545
G. Johnston
Affiliation:
Los Alamos National Laboratory, Los Alamos, New Mexico 87545
W. J. Waganarr
Affiliation:
Los Alamos National Laboratory, Los Alamos, New Mexico 87545
Get access

Abstract

Initial experiments on the evaporation from metallic and ceramic targets using a pulsed light ion beam source is reported. The source is an intense ion beam produced by a 1.2 MV, 300 kJ Anaconda generator which has been fitted with an extraction diode.

Beam fluences of 10–20 J/cm2 give a deposition rate of about 30–50 nm per shot, for both brass and YBa2Cu3O7-x (1–2–3) targets. This is about 1000 times greater than comparable rates from pulsed laser deposition (PLD). Single-shot ablated 1–2–3 films, deposited on Si, were analyzed using RBS; the measured stoichiometry was close to 1–2–3 in favorable cases, but shot-to-shot reproducibili ty was poor.

Approximately 1% of the available ion beam energy was utilized for these initial experiments. The potential for producing large area coatings from multi-cation targets and nanophase powders using pulsed ion beam deposition will be discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 279: Symposium A – Beam-Solid Interactions–Fundamentals and Applications , 1992 , 657
Copyright
Copyright © Materials Research Society 1993

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1]. Cheung, J. T. and Sankur, H., CRC Crit. Rev. in Solid State and Mat. Sci. 15, 63 (1988).Google Scholar
[2]. Bull. Mat. Res. Soc, Vol XVII (February, 1992). Special issue on pulsed laser deposition.Google Scholar
[3]. Fastow, R., Mayer, J. W., J. Appl Phys. 61, 175 (1987).CrossRefGoogle Scholar
[4]. Chu, W., Mader, S., Gorey, E., Baglin, J., Hodgson, R., Neri, J., Hammer, D. A., Nucl. Instr. and Meth. 194, 443 (1982).CrossRefGoogle Scholar
[5]. Smimotori, Y., Yokoyama, M., Isobe, H., Harada, S., Masugata, K., Yatsui, K., J. Appl Phys. 63, 968 (1988).Google Scholar
[6]. Goncharov, O. I., Isakov, I. F., Kolodii, V. N., Matvienko, V. M., Openkunov, M. S., Remnev, G. E., Usov, Yu P., and Zakutayev, A. N., in Proc. 8th Intern. Conf. on High Power Particle Beams, Eds. Breizrnan, B. N., Kynazev, B. A., Vol II, 1243 (World Scientific, Teaneck, NJ, 1991).Google Scholar
[7]. Rej, D. J., Bartsch, R. R., Davis, H. A., Faehl, R. J., Gautier, D. C, Greenly, J. B., Henins, I., Linton, T. W., Muenchausen, R. E., Waganaar, W. J., in Proc. 9th Intern. Conf. on High Power Particle Beams, Eds. Granestein, V. and Mosher, D., University of Maryland (in press).Google Scholar