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Novel Imprinting Techniques for Fabrication of Multilevel Flexible Electronics

Published online by Cambridge University Press:  02 February 2011

Daniël Turkenburg ,
Henk Rendering ,
Arjan Hovestad ,
Niki Stroeks ,
Pascale Maury ,
Pieter Moonen ,
Jurriaan Huskens ,
Ionuţ Barbu  and
Erwin Meinders
Daniël Turkenburg
Affiliation:
HOLST Center, High Tech Campus 31, 5656 AE Eindhoven, The Netherlands
Henk Rendering
Affiliation:
TNO Science & Industry, De Rondom 1, 5600 HE Eindhoven, The Netherlands
Arjan Hovestad
Affiliation:
TNO Science & Industry, De Rondom 1, 5600 HE Eindhoven, The Netherlands
Niki Stroeks
Affiliation:
TNO Science & Industry, De Rondom 1, 5600 HE Eindhoven, The Netherlands
Pascale Maury
Affiliation:
ASML, Veldhoven, De Run 5601, 5504 DR Veldhoven, The Netherlands
Pieter Moonen
Affiliation:
University of Twente, Hallenweg 15, 5722 NB Enschede, The Netherlands
Jurriaan Huskens
Affiliation:
University of Twente, Hallenweg 15, 5722 NB Enschede, The Netherlands
Ionuţ Barbu
Affiliation:
HOLST Center, High Tech Campus 31, 5656 AE Eindhoven, The Netherlands
Erwin Meinders
Affiliation:
HOLST Center, High Tech Campus 31, 5656 AE Eindhoven, The Netherlands
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Abstract

We report a novel method to selectively deposit materials from solution into imprinted micro-capillaries. Dewetting of the solvent just outside the capillaries is balanced to evaporation inside the capillaries. In this way conductive μ-wires can be self-assembled and self-aligned on flexible substrates opening the route to faster and cheaper plastic electronics.

Keywords

lithography (deposition)structuralelectrical properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1288: Symposium G – Novel Fabrication Methods for Electronic Devices , 2011 , mrsf10-1288-g09-05
Copyright
Copyright © Materials Research Society 2011

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References

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