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Noninvasive Real-Time Evaluation of the Anisotropic Thermal Diffusivity in Thin Polymer Films for Electronics Packaging

Published online by Cambridge University Press:  15 February 2011

John A. Rogers
Affiliation:
Department of Chemistry, Massachusetts Institute of Technology, Cambridge, MA 02139
C. Mindas
Affiliation:
Department of Chemistry, Massachusetts Institute of Technology, Cambridge, MA 02139
Y. Yang
Affiliation:
Department of Chemistry, Massachusetts Institute of Technology, Cambridge, MA 02139
K. A. Nelson
Affiliation:
Department of Chemistry, Massachusetts Institute of Technology, Cambridge, MA 02139
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Abstract

We describe an experimental method capable of evaluating the in- and out-of-plane components of the anisotropic thermal diffusivity in supported and unsupported thin polymer films. The technique is used to quantify the in-plane thermal diffusivity in films of PMDA/ODA (Dupont's P12545), BTDA/ODA/MPD (Dupont's P12555), BPDA/PPD (Dupont's P12611), BCB (Dow's Cyclotene 3022) and HFDA-APBP (Amoco's UD4212) with thicknesses in the 1–10 micron range.

Type
Research Article
Copyright
Copyright © Materials Research Society 1994

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References

1. Duggal, A.R., Rogers, J.A., and Nelson, K.A., J. Appl. Phys. 72, 2823 (1992); A.R. Duggal, J.A. Rogers, K.A. Nelson, and M.Rothschild, Appl. Phys. Lett. 60, 692 (1992); J.A. Rogers, S.M. Thesis, Massachusetts of Insitute of Technology, (1992).Google Scholar
2. Rogers, J.A. and Nelson, K.A., accepted in J. Appl. Phys.Google Scholar
3. Eichler, H.J., Gunter, P., and Pohl, D.W., Laser-Induced Dynamic Gratings (Springer, Berlin, 1986).CrossRefGoogle Scholar
4. Nelson, K.A. and Fayer, M.D., J. Chem. Phys. 72, 5202 (1980); K.A. Nelson, D.R. Lutz, M.D. Fayer, and L. Madison, Phys. Rev. B 24 3261 (1981).Google Scholar
5. Meth, J.S., Marshall, C.D., and Fayer, M.D., J. Appl. Phys. 67, 3362 (1990); J.S. Meth, C.D. Marshall, and M.D. Fayer, Chem. Phys. Lett. 162, 306 (1989).Google Scholar
6. Pan, J.Y., Thesis, Ph.D., Massachusetts Institute of Technology, (1991).Google Scholar
7. Robbins, H. and Schwartz, B., J. of the Electrochemical Soc., 107, 108 (1960).Google Scholar
8. Maseeh, F., Schmidt, M.A., Allen, M.G., and Senturia, S.D., IEEE Solid-State Sensor and Actuator Workshop.Google Scholar
9. Maseeh, F. and Senturia, S.D., Elastic Properties of Thin Polyimide Films in Polyimides: Materials. Chemistry. and Characterization. C. (Elsevier Science Publishers, Amsterdam, 1989).Google Scholar
10. Private communication, Professor Stephen D. Senturia, Massachusetts Institute of Technology.Google Scholar