Hostname: page-component-745bb68f8f-5r2nc Total loading time: 0 Render date: 2025-02-05T07:09:01.882Z Has data issue: false hasContentIssue false
  • English
  • Français

Non-Contact Real-Time Evaluation of Polyimide Thin Film Thermoelastic Properties Through Impulsive Stimulated Thermal Scattering

Published online by Cambridge University Press:  22 February 2011

J. A. Rogers ,
A. R. Duggal  and
K. A. Nelson
J. A. Rogers
Affiliation:
Chemistry Department, M.I.T., 77 Mass. Ave., Cambridge MA 02139
A. R. Duggal
Affiliation:
GE Research Laboratories, Schenectady N.Y.
K. A. Nelson
Affiliation:
Chemistry Department, M.I.T., 77 Mass. Ave., Cambridge MA 02139
Get access

Abstract

We demonstrate a new purely optical based method for the excitation and detection of acoustic and thermal disturbances in thin films. This technique is applied to the determination of the viscoelastic properties of unsupported and silicon supported polyimide thin (∼1 micron) films. We show how this technique can be used to detect film delaminations and suggest how it may be used to probe film-substrate adhesion quality.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 284: Symposium G – Amorphous Insulating Thin Films , 1992 , 547
Copyright
Copyright © Materials Research Society 1993

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Eichler, H.J., Gunter, P., and Pohl, D.W., Laser-Induced Dynamic Gratings (Springer, Berlin, 1986)Google Scholar
2. Nelson, K.A., and Fayer, M.D., J. Chem. Phys. 72, 5202 (1980);Google Scholar
Nelson, K.A., Lutz, D.R., Fayer, M.D., and Madison, L., Phys. Rev. B 24, 3261.;Google Scholar
Duggal, A.R., and Nelson, K.A., J. Chem. Phys. 94, 7677 (1991).Google Scholar
3. Duggal, A.R., Rogers, J.A., Nelson, K.A., and Rothschild, M., Appl. Phys. Lett. 60, 692 (1992)Google Scholar
4. Duggal, A.R., Rogers, J.A., and Nelson, K.A., J. Appl. Phys. 72, 2823 (1992).Google Scholar
5. Rogers, J.A., S.M. thesis, MIT, 1992.Google Scholar
6. Rogers, J.A., and Nelson, K.A. in preparationGoogle Scholar