Crossref Citations
This article has been cited by the following publications. This list is generated based on data provided by Crossref.
Liu, Po-tsun
Chang, T.C
Hsu, K.C
Tseng, T.Y
Chen, L.M
Wang, C.J
and
Sze, S.M
2002.
Characterization of porous silicate for ultra-low k dielectric application.
Thin Solid Films,
Vol. 414,
Issue. 1,
p.
1.
Liu, Po-Tsun
Chang, T. C.
Mor, Y. S.
Chen, C. W.
Tsai, T. M.
Chu, C. J.
Pan, F. M.
and
Sze, S. M.
2002.
Effective Strategy for Porous Organosilicate to Suppress Oxygen Ashing Damage.
Electrochemical and Solid-State Letters,
Vol. 5,
Issue. 3,
p.
G11.
Volksen, W.
Hawker, C. J.
Hedrick, J. L.
Lee, V.
Magbitang, T.
Toney, M.
Miller, R. D.
Huang, E.
Liu, J.
Lynn, K. G.
Petkov, M.
Rodbell, K.
and
Weber, M. H.
2003.
Low Dielectric Constant Materials for IC Applications.
Vol. 9,
Issue. ,
p.
167.
Mallikarjunan, A.
Murarka, S. P.
and
Lu, T.-M.
2004.
Separation of copper ion-induced and intrinsic polymer instabilities in polyarylether using triangular voltage sweep.
Journal of Applied Physics,
Vol. 95,
Issue. 3,
p.
1216.
Srikrishnan, K
and
Cogin Schwartz, Geraldine
2006.
Handbook of Semiconductor Interconnection Technology, Second Edition.
p.
211.