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New Experimental Approach for Measuring Electrical Contact Resistance with an Accurate Mechanical Actuation, Evaluation of the Performances of Gold Micro-switches

Published online by Cambridge University Press:  01 February 2011

Cedric Seguineau ,
Adrien Broue ,
Fabienne Pennec ,
Jérémie Dhennin ,
Jean-Michel Desmarres ,
Arnaud Pothier ,
Xavier Lafontan  and
Michel Ignat
Cedric Seguineau
Affiliation:
[email protected], NOVA MEMS, QA, CNES, DCT/AQ/LE, bpi 1414, 18 Avenue Edouard Belin, TOULOUSE, 31401, France, +33561281935, +33561274732
Adrien Broue
Affiliation:
[email protected], NOVA MEMS, 10 Avenue de l'Europe, Ramonville, 31520, France
Fabienne Pennec
Affiliation:
[email protected], LAAS - CNRS, 7 Avenue du Colonel Roche, Toulouse, 31401, France
Jérémie Dhennin
Affiliation:
[email protected], NOVA MEMS, 10 Avenue de l'Europe, Ramonville, 31520, France
Jean-Michel Desmarres
Affiliation:
[email protected], CNES, DCT/AQ/LE, 18 Avenue Edouard Belin, Toulouse, 31401, France
Arnaud Pothier
Affiliation:
[email protected], XLIM LAboratoy, Minacom dpt, 123 Avenue Albert Thomas, Limoges, 87060, France
Xavier Lafontan
Affiliation:
[email protected], NOVA MEMS, 10 Avenue de l'Europe, Ramonville, 31520, France
Michel Ignat
Affiliation:
[email protected], INPG, SIMaP, UMR 5266, Université Joseph Fourier, St Martin d'Heres, 38402, France
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Abstract

A specific experimental setup combining nanoindentation and electrical inputs has been developed in order to determine the reliability and the performances of Micro-ElectroMechanical Systems (MEMS) which include thin free-standing elements like micro-switches applications. The evolution of the electrical resistance with respect to a mechanical solicitation applied on the contact, are henceforth available. The description of the set-up goes with a brief overview of the tests performed on a gold ohmic switch. A discussion is developed considering the mechanisms involved in the contact response. This is based on a confrontation among the experimental results, the analytical modeling and also finite-element analysis.

Keywords

microelectro-mechanical (MEMS)electrical propertiesnanoscale
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1052: Symposium DD – Microelectromechanical Systems–Materials and Devices , 2007 , 1052-DD06-30
Copyright
Copyright © Materials Research Society 2008

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References

1 Mankins, J.C., “Technology Readiness Levels: A White Paper”, NASA, Office of Space Access and Technology, Advanced Concepts Office Google Scholar
2 Oliver, W.C., Pharr, G.M., J. Mater. Res., 7(6), 1564-1583 (1992)Google Scholar
3 Dikrell, D.J. III, Dugger, M.T., Electrical Contacts, 2005. Proc. of the 51st IEEE Conf., 255–258 (2005)Google Scholar
4 Seguineau, C., Desmarres, J.-M., Dhennin, J., Lafontan, X., Ignat, M., “MEMS reliability : Accurate measurements of beam stiffness using nanoindentation techniques”, Proc. of CANEUS 2006 Google Scholar
5 Seguineau, C., Broue, A., Dhennin, J., Desmarres, J.-M., Pothier, A., Lafontan, X., Ignat, M., “Mechanical cycling for electrical performances of materials used in MEMS: application to Gold micro-switches”, for publication in “Metals, Materials and Processesfl Google Scholar
6 Green, I.A, Trib Trans; 45(3), 284–293 (2002)Google Scholar
7 Peyrou, D. et al. , “Multiphysics Softwares Benchmark on Ansys / Comsol Applied For RF MEMS Switches Packaging Simulations”, Eurosime 2006, Côme (Italia), 24–26 Ap. 2006), 8pGoogle Scholar
8 Mikrajuddin, A., Shi, F.G., Kim, H.K., Okuyama, K., Material Science in Semiconductor Processing, Vol. 2, 321–327 (1999)Google Scholar