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Nanotectonics: Direct Fabrication of All-Inorganic Logic Elements and Micro-Electro-Mechanical Systems from Nanoparticle Precursors
Published online by Cambridge University Press: 15 February 2011
Abstract
The reduced melting point and high solubility of inorganic nanoparticles have been shown to be useful in the low-temperature solution-based fabrication of semiconductor devices. These inks have been patterned using various techniques to form inorganic logic elements, multi-layer structures, and MEMS. Here we report a new technique known as offset liquid embossing that is used to print the nanoparticle inks. Structures created include multiple layers of gold and spin-on-glass printed without the need for etching or planarization, and 100 nm resolution.
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- Copyright © Materials Research Society 2003
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