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Nanoindentation and Nanowear Studies of Sputter-Deposited Ultrathin Tin Oxide Films on Glass Substrates

Published online by Cambridge University Press:  21 March 2011

J. G. Wang ,
M. E. Stahley ,
C. G. Pantano ,
D. H. Yang ,
T. Anderson  and
L. Kuhn
J. G. Wang
Affiliation:
Materials Research Institute & Department of Materials Science and Engineering, The Pennsylvania State University, University Park, PA 16802
M. E. Stahley
Affiliation:
Materials Research Institute & Department of Materials Science and Engineering, The Pennsylvania State University, University Park, PA 16802
C. G. Pantano
Affiliation:
Materials Research Institute & Department of Materials Science and Engineering, The Pennsylvania State University, University Park, PA 16802
D. H. Yang
Affiliation:
Hysitron, Inc., 5251 W. 73rd St., Minneapolis, MN 55439
T. Anderson
Affiliation:
Hysitron, Inc., 5251 W. 73rd St., Minneapolis, MN 55439
L. Kuhn
Affiliation:
Hysitron, Inc., 5251 W. 73rd St., Minneapolis, MN 55439
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Abstract

Tin oxide thin films on glass are used in a variety of applications ranging from transparent conductors to coupling layers to wear resistant coatings. The mechanical properties and wear resistance are crucial to most applications of tin oxide films. In the present study, ultrathin tin oxide films were sputter-deposited on the two different glass substrates. Nanoindentation, nanoscratch and nanowear experiments were performed on the tin oxide films with different thickness using a Hysitron TriboScope at different loads. Hardness and Young's modulus of elasticity were determined from the depth sensing load-displacement data. A lower friction coefficient was observed on the thinner film using the ramping load scratch test. Critical loads were determined by the ramping load scratch test and multi-slide nanowear tests on the tin oxide film deposited on the alkali contained commercial float glass (LOF-P16) glass. Discussion on the effect of surface chemistry on the mechanical properties was made.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 695: Symposium L – Thin Films: Stresses and Mechanical Properties IX , 2001 , L3.6.1
Copyright
Copyright © Materials Research Society 2002

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References

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