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NanoCT: Visualizing of internal 3D-Structures with Submicrometer Resolution

Published online by Cambridge University Press:  01 February 2011

Oliver Brunke ,
Dirk Neuber  and
David K. Lehmann
Oliver Brunke
Affiliation:
[email protected], phoenix|x-ray, Application, Niels-Bohr-Str. 7, Wunstorf, 30655, Germany
Dirk Neuber
Affiliation:
[email protected], phoenix|x-ray, Wunstorf, 30655, Germany
David K. Lehmann
Affiliation:
[email protected], phoenix|x-ray, St. Petersburg, FL, 33701, United States
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Abstract

High-resolution Computed Tomography (CT) widely expands the spectrum of detectable internal micro-structures. The new nanotom CT system allows the analysis of samples with the exceptional voxel-resolution of less than 0.5 microns per volume pixel (voxel). Thus internal detail related to a variation in material, density or porosity can be visualised and precisely measured. This opens a new dimension of 3D-microanalysis and will partially substitute traditional destructive methods in industrial quality control and research.

The nanotom® is the first 180 kV nanoCT system world-wide which is tailored specifically to the highest-resolution applications in material science, micro electronics, geology and biology. Therefore it is particularly suitable for nanoCT-examinations of material samples of any type like synthetic materials, ceramics, composite materials, mineral and organic samples.

Several results of high-resolution nanoCT demonstrate the capability to analyse the 3D-microstructure of materials with only minimal sample preparation. For instance, it is possible to image different metal phases in solder joints, the texture of fibres in composites or the volume and distribution of voids in castings.

The volume data set is visualised by slices or compiled in a three-dimensional view which can be displayed in various ways. By means of volume visualisation software, the three-dimensional structure of the reconstructed volume can be easily analysed for pores, cracks, and materials density and distribution with the highest magnification and image quality available.

By granting the user the ability to navigate the internal structure of an object slice-by-slice with highest resolution in a non-destructive manner, the nanotom creates new possibilities for analysis which have so far been unreachable.

Keywords

x-ray tomographymicrostructuresensor
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 990: Symposium B – Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectronics , 2007 , 0990-B05-09
Copyright
Copyright © Materials Research Society 2007

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References

REFERENCES

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