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Nanocomposite Thin Films of Transition Metal Carbides Fabricated Using Pulsed Laser Deposition
Published online by Cambridge University Press: 10 February 2011
Abstract
A study has been conducted on the pulsed laser deposition (PLD) of transition metal carbides in order to examine alloying and phase formation in binary systems. Alternating layers of TiC/ZrC and ZrC/VC were deposited at 400 C and 5 mTorr Ar with nominal period thicknesses of 0.6 nm, 10.0 nm, and 50.0 nm. ZrC/VC x-ray diffraction analysis showed that the alloys were amorphous and the TiC/ZrC alloys were crystalline. The thicker films showed a higher degree of phase separation of the two compounds. Transmission electron microscopy confirmed the amorphous structure in the 0.6 nm ZrC/VC film, while the 50.0 nm film showed a layered structure and extremely fine grain size.
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- Copyright © Materials Research Society 1997
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