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Monte Carlo Simulation of Radiative Heat Transfer in Rapid Thermal Processing (RTP) Systems

Published online by Cambridge University Press:  22 February 2011

J. Vernon Cole ,
Karson L. Knutson  and
Klavs F. Jensen
J. Vernon Cole
Affiliation:
Massachusetts Institute of Technology, Department of Chemical Engineering Cambridge, MA 02139
Karson L. Knutson
Affiliation:
Massachusetts Institute of Technology, Department of Chemical Engineering Cambridge, MA 02139
Klavs F. Jensen
Affiliation:
Massachusetts Institute of Technology, Department of Chemical Engineering Cambridge, MA 02139
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Abstract

We present a general purpose Monte Carlo method for the simulation of radiation heat transfer in rapid thermal processing (RTP) chambers. Three-dimensional mesh generation software is used to discretize the surfaces within the system, allowing the simulation of realistic chamber and reflector designs. An adaptive subdivision of the chamber geometry reduces the number of raysurface intersections which must be computed. The method models internal reflection, absorption, and transmission within participating media, and includes wavelength, temperature, and material dependent optical properties. Radiation heat transfer simulations are used to examine a reflector assembly, and to test the assumptions of optical wafer temperature measurement techniques.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 342: Symposium G – Rapid Thermal and Integrated Processing III , 1994 , 425
Copyright
Copyright © Materials Research Society 1994

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References

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