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Modelling of the Pattern Formation of Thin Film Silicon Single Crystals

Published online by Cambridge University Press:  28 February 2011

D.K. Shangguan  and
J.D. Hunt
D.K. Shangguan
Affiliation:
Department of Metallurgy and Science of Materials, University of Oxford, U.K.
J.D. Hunt
Affiliation:
Department of Metallurgy and Science of Materials, University of Oxford, U.K.
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Abstract

In this work faceted cellular growth has been investigated both experimentally and theoretically. The faceted cellular growth process and pattern formation have been modelled numerically. It is found that both the growth kinetics and the solute effect play important roles in determining the faceted cellular structure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 107: Symposium H – Silicon-on-Insulator and Buried Metals in Semiconductors , 1987 , 175
Copyright
Copyright © Materials Research Society 1988

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