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A Model for Curvature in Film-Substrate System

Published online by Cambridge University Press:  01 February 2011

G. Vanamu ,
T. A. Khraishi  and
A. K. Datye
G. Vanamu
Affiliation:
Department of Chemical and Nuclear Engineering, University of New Mexico, Albuquerque, NM-87131, U.S.A.
T. A. Khraishi
Affiliation:
Mechanical Engineering Department, University of New Mexico, Albuquerque, NM-87131, U.S.A.
A. K. Datye
Affiliation:
Department of Chemical and Nuclear Engineering, University of New Mexico, Albuquerque, NM-87131, U.S.A.
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Abstract

Growth of lattice mismatched films creates bending in the whole structure. There has been great interest in the study of these curvatures in epitaxially-grown materials. An analytical solution for the radius of curvature produced by stresses developed in growing lattice mismatched materials has been obtained. The analyses were based on beam bending theory and strain partitioning theory introduced by our group earlier. The expressions for radius of curvature were obtained for a two-layer heterostructure. The variation of the radius of curvature with the relative thicknesses, relative lattice constants, and relative elastic constants of the layers was determined. The model was verified by applying it to a symmetric tri-laminate structure. The above model can also be extended to determine the curvature for multi-layered heterostructures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 875: Symposium O – Thin Films - Stresses and Mechanical Properties XI , 2005 , O4.6
Copyright
Copyright © Materials Research Society 2005

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