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Mode–I Fracture Toughness of Tetrahedral Amorphous Diamond-like Carbon (ta-C) MEMS

Published online by Cambridge University Press:  01 February 2011

K. Jonnalagadda ,
S.W. Cho ,
I. Chasiotis ,
T.A. Friedmann  and
J.P. Sullivan
K. Jonnalagadda
Affiliation:
Mechanical and Aerospace Engineering, University of Virginia
S.W. Cho
Affiliation:
Mechanical and Aerospace Engineering, University of Virginia
I. Chasiotis
Affiliation:
Mechanical and Aerospace Engineering, University of Virginia
T.A. Friedmann
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico
J.P. Sullivan
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico
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Abstract

Mode-I fracture toughness studies were conducted on hydrogen-free tetrahedral amorphous diamond-like carbon (ta-C) MEMS specimens of various thicknesses. Mathematically sharp edge pre-cracks were generated through micro indentation on the Silicon dioxide sacrificial layer. An atomic force microscope (AFM) was employed to measure the precise length and orientation of each pre-crack. Upon wet etching and release the freestanding uniform width and varying thickness MEMS-scale specimens were tested in Mode-I using a custom-made micro-tensile tester. Fracture toughness values were computed from the test data using linear elastic fracture mechanics (LEFM) for a finite width specimen with an edge crack in the fixed grip loading configuration. The average Mode-I fracture toughness for 0.5 micron thick specimens was found to be while the average mode-I fracture toughness for 1 micron specimens was .

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 854: Symposium U – Stability of Thin Films and Nanostructures , 2004 , U9.7
Copyright
Copyright © Materials Research Society 2005

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References

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