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Mirror Electron Microscopy for Inspection of Flat Surfaces

Published online by Cambridge University Press:  01 February 2011

Masaki Hasegawa  and
Tomokazu Shimakura
Masaki Hasegawa
Affiliation:
[email protected], Hitachi, Ltd., Central Research Laboratory, Advanced Technology Research Department, 1-280, Higashi-koigakubo Kokubunji-shi, Tokyo, 185-8601, Japan
Tomokazu Shimakura
Affiliation:
[email protected], Hitachi, Ltd., Central Research Laboratory, Advanced Technology Research Department, 1-280, Higashi-koigakubo Kokubunji-shi, Tokyo, 185-8601, Japan
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Abstract

We have developed a mirror electron microscope (MEM) for inspecting fine processed flat surfaces. This apparatus can detect nanometer-sized particles and scratches on very flat surfaces. Its sensitivity for electric charge distribution is useful for detecting failures in microdevice patterns. In observation of an insulator surface with the MEM, complex features caused by small amount of charge distribution were observed in the images. We believe that the MEM can provide different methods for characterization of electrical behavior on insulator surfaces.

Keywords

electron microprobemicrostructureinsulator
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1088: Symposium W – Advances and Applications of Surface Electron Microscopy , 2008 , 1088-W04-02
Copyright
Copyright © Materials Research Society 2008

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