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Microstructure of sputter-deposited noble metal-incorporated oxide thin films patterned by means of laser interference

Published online by Cambridge University Press:  22 June 2011

Rodolphe Catrin ,
Thomas Gries ,
David Horwat ,
Sylvie Migot  and
Frank Muecklich
Rodolphe Catrin*
Affiliation:
Functional Materials, Saarland University, Campus D3.3, D-66123 Saarbruecken, Germany.
Thomas Gries
Affiliation:
Functional Materials, Saarland University, Campus D3.3, D-66123 Saarbruecken, Germany.
David Horwat
Affiliation:
Institut Jean Lamour, Département CP2S, UMR 7198, École des Mines de Nancy, Parc de Saurupt, F-54042 Nancy, France.
Sylvie Migot
Affiliation:
Institut Jean Lamour, Département CP2S, UMR 7198, École des Mines de Nancy, Parc de Saurupt, F-54042 Nancy, France.
Frank Muecklich
Affiliation:
Functional Materials, Saarland University, Campus D3.3, D-66123 Saarbruecken, Germany.
*
*Corresponding author. Tel.: +49 681 302 70548; fax: +49 681 302 70502. E-mail address: [email protected] (R. Catrin)
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Abstract

Laser interference patterning-induced microstructural modifications have been investigated in two noble metal-incorporated oxide thin film systems: Pd0.25Pt0.75Ox and gold-incorporated yttria-stabilized zirconia - Au-YSZ. Transmission electron microscopy was used to investigate the influence of the laser treatment on the microstructure of the samples. In the case of Pd0.25Pt0.75Ox, the formation of a nanocomposite arrangement resulted from the precipitation of metal nanograins in the oxide matrix triggered by laser irradiation. In Au-YSZ, the starting microstructure consisted of gold nanograins embedded in a YSZ matrix. A noticeable growth and coalescence of gold nanograins occurred near the surface in the region of maximum interference. Simultaneously, a foamy morphology, mostly consisting of gold crystals, was formed at the film surface. In contrast to thermal annealing, the laser treatment proposed here is a fast procedure to partially relocate gold at the film surface and provide a local solid lubrication.

Keywords

laser-induced reactioncrystal growththin film
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1339: Symposium S – Plasma-Assisted Materials Processing and Synthesis , 2011 , mrss11-1339-s01-04
Copyright
Copyright © Materials Research Society 2011

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Footnotes

aCurrently at Institut Jean Lamour, Département CP2S, UMR 7198, École des Mines de Nancy, Parc de Saurupt, F-54042 Nancy, France.

References

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