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Microstructural Characterization of Texture in Tungsten Films made by Ion-Assisted Evaporation
Published online by Cambridge University Press: 25 February 2011
Abstract
The microstructure of tungsten films deposited by ion-assisted evaporation (IAE) has been examined by transmission electron microscopy. It is proposed that grain shape is strongly associated with stress and texture changes in IAE films. Evidence is also found of stress induced damage in the substrate due to stress transfer from the deposited tungsten films.
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- Copyright © Materials Research Society 1990
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