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MEMS-Based MHz Silicon Ultrasonic Nozzles for Production of Monodisperse Drops

Published online by Cambridge University Press:  01 February 2011

Y. L. Song ,
Chih H. Cheng ,
Ning Wang ,
Shirley C. Tsai ,
Yuan F. Chou ,
Ching T. Lee  and
Chen S. Tsai
Y. L. Song
Affiliation:
[email protected], University of California, Electrical Engineering and Computer Science, Irvine, CA, 92697, United States
Chih H. Cheng
Affiliation:
[email protected], National Taiwan University, Mechanical Engineering, Taipei, N/A, Taiwan
Ning Wang
Affiliation:
[email protected], University of California, Electrical Engineering and Computer Science, Irvine, CA, 92697, United States
Shirley C. Tsai
Affiliation:
[email protected], Calfiornia State University, Chemiccal Engineering, Long Beach, CA, 90840, United States
Yuan F. Chou
Affiliation:
[email protected], National Taiwan University, Mechanical Engineering, Taipei, N/A, Taiwan
Ching T. Lee
Affiliation:
[email protected], National Cheng-Kung University, Electrical Engineering, Tainan, N/A, Taiwan
Chen S. Tsai
Affiliation:
[email protected], University of California, Electrical Engineering and Computer Science, Irvine, CA, 92697, United States
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Abstract

This paper reports production of 4.5 μm-diameter monodisperse water drops using a micro electro-mechanical system (MEMS)-based 1 MHz 3-Fourier horn ultrasonic nozzle. The required electrical drive voltage for atomization was 6.5 V at 964±1 kHz that is in good agreements with the values obtained by impedance measurement and by the three-dimensional (3-D) simulation using a commercial finite element analysis program. Such small diameter drops with geometrical standard deviation (GSD) as small as 1.2 and 90% inhale-able fine particle fraction (<5.8 μm-diameter) were achieved in ultrasonic atomization for the first time. Therefore, the MEMS-based MHz ultrasonic nozzles should have potential application to targeted delivery of reproducible doses of medicine to the respiratory system.

Keywords

acousticspray depositionbiomedical
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1052: Symposium DD – Microelectromechanical Systems–Materials and Devices , 2007 , 1052-DD08-07
Copyright
Copyright © Materials Research Society 2008

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