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Mechanical Properties of Ultrananocrystalline Diamond Thin Films for MEMS Applications

Published online by Cambridge University Press:  11 February 2011

H.D. Espinosa ,
B. Peng ,
K.-H. Kim ,
B.C. Prorok ,
N. Moldovan ,
X.C. Xiao ,
J.E. Gerbi ,
J. Birrell ,
O. Auciello  and
J.A. Carlisle
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H.D. Espinosa
Affiliation:
Department of Mechanical Engineering, Northwestern University, Evanston, IL 60208–3111, USA
B. Peng
Affiliation:
Department of Mechanical Engineering, Northwestern University, Evanston, IL 60208–3111, USA
K.-H. Kim
Affiliation:
Department of Mechanical Engineering, Northwestern University, Evanston, IL 60208–3111, USA
B.C. Prorok
Affiliation:
Materials Research and Education Center, Auburn University, Auburn, AL 36849–5341, USA
N. Moldovan
Affiliation:
Materials Science and Experimental Facilities Divisions, Argonne National Laboratory, Argonne, IL 60439, USA
X.C. Xiao
Affiliation:
Materials Science and Experimental Facilities Divisions, Argonne National Laboratory, Argonne, IL 60439, USA
J.E. Gerbi
Affiliation:
Materials Science and Experimental Facilities Divisions, Argonne National Laboratory, Argonne, IL 60439, USA
J. Birrell
Affiliation:
Materials Science and Experimental Facilities Divisions, Argonne National Laboratory, Argonne, IL 60439, USA
O. Auciello
Affiliation:
Materials Science and Experimental Facilities Divisions, Argonne National Laboratory, Argonne, IL 60439, USA
J.A. Carlisle
Affiliation:
Materials Science and Experimental Facilities Divisions, Argonne National Laboratory, Argonne, IL 60439, USA
D.M. Gruen
Affiliation:
Materials Science and Experimental Facilities Divisions, Argonne National Laboratory, Argonne, IL 60439, USA
D.C. Mancini
Affiliation:
Materials Science and Experimental Facilities Divisions, Argonne National Laboratory, Argonne, IL 60439, USA
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Abstract

Microcantilever deflection and the membrane deflection experiment (MDE) were used to examine the elastic and fracture properties of ultrananocrystalline diamond (UNCD) thin films in relation to their application to microelectromechanical systems (MEMS). Freestanding microcantilevers and membranes were fabricated using standard MEMS fabrication techniques adapted to our UNCD film technology. Elastic moduli measured by both methods described above are in agreement, with the values being in the range 930 and 970 GPa with both techniques showing good reproducibility. The MDE test showed fracture strength to vary from 3.95 to 5.03 GPa when seeding was performed with ultrasonic agitation of nanosized particles.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 741: Symposium J – Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines , 2002 , J9.2
Copyright
Copyright © Materials Research Society 2003

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References

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