Hostname: page-component-745bb68f8f-d8cs5 Total loading time: 0 Render date: 2025-01-27T02:38:10.175Z Has data issue: false hasContentIssue false
  • English
  • Français

Measurement of Particle Densities and Sizes: Application to Silane/Argon Plasmas

Published online by Cambridge University Press:  28 February 2011

Kenneth G. Spears  and
Timothy J. Robinson
Kenneth G. Spears
Affiliation:
Northwestern University, Chemistry Department, 2145 Sheridan Road, Evanston, Illinois 60201
Timothy J. Robinson
Affiliation:
Northwestern University, Chemistry Department, 2145 Sheridan Road, Evanston, Illinois 60201
Get access

Abstract

We discuss new methods for measuring particle number densities, masses and size distributions by laser techniques.These methods do not require assumptions of particle optical properties or instrumental calibration by known particles.We summarize the theoretical basis of these techniques and discuss the light scattering fluctuation analysis, which can yield number density and size information.Experimental data for rf discharges of silane/argon mixtures are briefly presented to illustrate some of the theoretical predictions.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 68: Symposium C – Plasma Processing , 1986 , 121
Copyright
Copyright © Materials Research Society 1986

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Roth, R.M., Spears, K.G., Stein, G.D. and Wong, G., Appl.Phys.Lett. 46, 253 (1985).Google Scholar
2. Spears, K.G. and Roth, R.M., Proceedings of a Symposium on Plasma Synthesis and Etching of Electronic Materials, V.38 (Materials Research Society, 1985), pp.111–116.Google Scholar
3. Spears, K.G., Robinson, T.J. and Roth, R.M., to be published, IEEE Transactions on Plasma Science, PS–14, 179 (1986)CrossRefGoogle Scholar
4. Berne, B.J. and Pecora, R., Dynamic Light Scattering (John Wiley & Sons, New York, 1976).Google Scholar
5. Kyle, T.G., J.Aerosol Science 10, 87 (1979).Google Scholar
6. Jones, R., Oliver, C.J. and Pike, E.R., Appl.Optics 10, 1673 (1971).Google Scholar
7. Elson, E.L. and Magde, D., Biopolymers 13, 1 (1974).-Google Scholar
8. Magde, D., Elson, E.L. and Webb, W.W., Biopolymers 13, 29 (1974).Google Scholar
9. Magde, O., Webb, W.W. and Elson, E.L., Biopolymers 77, 361 (1978).Google Scholar
10. Schaefer, D.W. and Berne, B.J., Phys.Rev.Lett. 28, 475 (1972).Google Scholar
11. Koppel, D.E., Phys.Rev.A 10, 1938 (1974).Google Scholar
12. Spears, K.G. and Robinson, T.J. (to be published).Google Scholar