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Materials and Design Study for Micromachined Solid Oxide Fuel Cells Membranes

Published online by Cambridge University Press:  26 February 2011

Samuel Rey-Mermet  and
Paul Muralt
Samuel Rey-Mermet
Affiliation:
[email protected], Swiss Federal Institute of Technology in Lausanne, Materials Departement, STI-IMX-LC, Station 12, Lausanne, 1013, Switzerland
Paul Muralt
Affiliation:
[email protected], Ecole Polytechnique Fédérale de Lausanne EPFL, Ceramics Laboratory, STI-IMX-LC, Station 12, Lausanne, 1013, Switzerland
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Abstract

Miniature solid oxide fuel cells (μSOFC) are very promising energy sources for portable devices. In this work we report on fabrication and on first experimental results of μSOFCs processed by means of silicon and thin film technology. All the layers involved in the PEN (Positive electrode-Electrolyte-Negative electrode) structure were sputter deposited on silicon wafer. The PEN membrane was liberated using deep silicon dry etching. The cathode is a combination of a very fine platinum grid covered by a thin LSC layer. The electrolyte is a bilayer of YSZ and CGO ionic conductors. Scanning electrons microscope and X-ray analysis show that the deposited films are polycrystalline with a columnar microstructure. The conductivities of these films are sufficiently high for cell operation at 550°C. The anode is composed of a NiO-Ni-CGO composite. A supporting structure consisting of an electroplated nickel grid is deposited on top of the anode and is part of it. The final PEN is a free standing 1 micron thick membrane, with a diameter of 5 mm. First measurements showed that this structure is mechanically stable up to 550°C and that the cell works with an OCV of 200 mV.

Keywords

thin filmphysical vapor deposition (PVD)Si
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 972: Symposium AA – Solid-State Ionics—2006 , 2006 , 0972-AA07-10-BB08-10
Copyright
Copyright © Materials Research Society 2007

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References

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