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Mass Transport, Faceting and Behavior of Dislocations in GaN

Published online by Cambridge University Press:  03 September 2012

S. Nitta ,
T. Kashima ,
M. Kariya ,
Y. Yukawa ,
S. Yamaguchi ,
H. Amano  and
I. Akasaki
S. Nitta
Affiliation:
Department of Electrical and Electronic Engineering, High-Tech Research Center, Meijo University, Tempaku-ku, Nagoya 468-8502, Japan
T. Kashima
Affiliation:
Department of Electrical and Electronic Engineering, High-Tech Research Center, Meijo University, Tempaku-ku, Nagoya 468-8502, Japan
M. Kariya
Affiliation:
Department of Electrical and Electronic Engineering, High-Tech Research Center, Meijo University, Tempaku-ku, Nagoya 468-8502, Japan
Y. Yukawa
Affiliation:
Department of Electrical and Electronic Engineering, High-Tech Research Center, Meijo University, Tempaku-ku, Nagoya 468-8502, Japan
S. Yamaguchi
Affiliation:
High-Tech Research Center, Meijo University, Tempaku-ku, Nagoya 468-8502, Japan
H. Amano
Affiliation:
Department of Electrical and Electronic Engineering, High-Tech Research Center, Meijo University, Tempaku-ku, Nagoya 468-8502, Japan High-Tech Research Center, Meijo University, Tempaku-ku, Nagoya 468-8502, Japan
I. Akasaki
Affiliation:
Department of Electrical and Electronic Engineering, High-Tech Research Center, Meijo University, Tempaku-ku, Nagoya 468-8502, Japan High-Tech Research Center, Meijo University, Tempaku-ku, Nagoya 468-8502, Japan
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Abstract

The behavior of threading dislocations during mass transport of GaN was investigated in detail by transmission electron microscopy. Mass transport occurred at the surface. Therefore, growing species are supplied from the in-plane direction. The behavior of threading dislocations was found to be strongly affected by the mass transport process as well as the high crystallographic anisotropy of the surface energy of the facets particular to GaN.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 595: Symposium W – GaN and Related Alloys - 1999 , 1999 , F99W2.8
Copyright
Copyright © Materials Research Society 1999

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