Hostname: page-component-745bb68f8f-kw2vx Total loading time: 0 Render date: 2025-02-04T17:54:17.823Z Has data issue: false hasContentIssue false
  • English
  • Français

Low-Energy Deposition of High-Strength AI(O) Alloys From an ECR Plasma

Published online by Cambridge University Press:  21 February 2011

J.C. Barbour ,
D.M. Follstaedt ,
J.A. Knapp ,
D.A. Marshall ,
S.M. Myers  and
R.J. Lad
J.C. Barbour
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185,
D.M. Follstaedt
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185,
J.A. Knapp
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185,
D.A. Marshall
Affiliation:
University of Maine, Orono, ME 04469
S.M. Myers
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185,
R.J. Lad
Affiliation:
University of Maine, Orono, ME 04469
Get access

References and acknowledgments

Low-energy deposition of AI(O) alloys from an electron cyclotron resonance (ECR) plasma offers a scaleable method for the synthesis of thick, high-strength AI layers. This work compares alloy layers formed by an ECR-O2 plasma in conjunction with AI evaporation to O-implanted AI (ion energies 25–200 keV), and it examines the effects of volume fraction of AI2O3 phase and deposition temperature on the yield stress of the material. TEM showed the AI(O) alloys contain a dense dispersion of small y-AbOa precipitates (∼1 nm) in a fine-grain (10–100 nm) fee AI matrix when deposited at a temperature of ∼100°C, similar to the microstructure for gigapascal-strength O-implanted AI. Nanoindentation gave hardnesses for ECR films from 1.1 to 3.2 GPa, and finite-element modeling gave yield stresses up to 1.3 ± 0.2 GPa with an elastic modulus of 66 GPa ± 6 GPa (similar to pure bulk AI). The yield stress of a polycrystalline pure AI layer was only 0.19+0.02 GPa, which was increased to 0.87+0.15 GPa by implantation with 5 at.% O.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 396: Symposium A – Ion-Solid Interactions for Materials Modification and Processing , 1995 , 497
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Bourcier, R.J., Myers, S.M., and Polonis, D.H., Nucl. Instrum. and Meth. B44 (1990) 278.Google Scholar
2 Barbour, J.C., Follstaedt, D.M., and Myers, S.M. Nucl. Instrum. and Meth. B, in press.Google Scholar
3 ABAQUS/Explicit version, 5.4, Hibbitt, Karlsson & Sorensen, Inc., Pawtucket, Rl.Google Scholar
4 Orowan, E., Symp. Internal Stresses in Metals and Alloys (Inst. of Metals, London, 1948) p.451.Google Scholar
5 Ashby, M.F., in Physics of Strength and Plasticity, ed. Argon, A.S. (MIT Press, Cambridge, MA, 1969)Google Scholar
6 Fisher, J.C., Hart, E.W., and Pry, R.H., Acta Met. 1 (1953) 336.Google Scholar
7 Ansell, G.S., in Oxide Dispersion Strengthening, ed. Ansell, G.S., Cooper, T.D., and Lenel, F.V. (Gordon and Breach, New York, 1968) p. 61.Google Scholar
8 Porter, D.A. and Easterling, K.E., Phase Transformations in Metals and Alloys, Van Nostrand Reinhold, New York, 1981, pp. 139–142.Google Scholar
9 Follstaedt, D.M., Myers, S.M., Bourcier, R.J., and Dugger, M.T., Proc. Int. Conf. on Beam Processing of Advanced Materials, ed. Singh, J. and Copley, S.M. (TMS, Warrendale, 1993) p. 507.Google Scholar
10 Nix, W.D., Metall. Trans. A 20 (1989) 2217.Google Scholar
11 Knapp, J.A., Follstaedt, D.M., and Myers, S.M., J. Appl. Phys. 79 (1996), in press.Google Scholar
12 McClintock, F.A., in Mechanical Behavior of Materials, ed. McClintock, F.A. and Argon, A.S., (Addison-Wesley, Reading, 1966) p 86.Google Scholar