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Limitations on Roll Based Microcontact Printing Imposed by Variations in Macro Scale Stamp Dimensions

Published online by Cambridge University Press:  30 March 2012

Joseph E. Petrzelka  and
David E. Hardt
Joseph E. Petrzelka
Affiliation:
Massachusetts Institute of Technology, 77 Massachusetts Ave., Cambridge, MA 02139, U.S.A.
David E. Hardt
Affiliation:
Massachusetts Institute of Technology, 77 Massachusetts Ave., Cambridge, MA 02139, U.S.A.
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Abstract

Microcontact printing is a versatile patterning technique, but is often limited by deformation of the stamp pattern. This paper examines the sensitivity of stamp pressure distributions to variations in displacement when the microcontact printing stamp is mounted on a rigid roll. To this end, we examine analytic and numeric solutions to the contact problem and verify our models with experimental data. Using these results, we provide insight to process limits imposed by dimensional errors in the printing system.

Keywords

lithography (deposition)simulationnanoscale
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1401: Symposium T – Large-Area Processing and Patterning for Active Optical and Electronic Devices III , 2012 , mrsf11-1401-t02-06
Copyright
Copyright © Materials Research Society 2012

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References

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