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Laser-Induced Thermal Decomposition of Platinum Metallo-Organic Films

Published online by Cambridge University Press:  28 February 2011

A. Gupta ,
R. C. Sausa  and
J. R. White
A. Gupta
Affiliation:
IBM Thomas J. Watson Research Center, Yorktown Heights, NY 10598
R. C. Sausa
Affiliation:
IBM Thomas J. Watson Research Center, Yorktown Heights, NY 10598
J. R. White
Affiliation:
IBM Systems Technology Division, Endicott, NY 13760
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Abstract

The focused output from an argon ion laser (514 nm) has been used to pattern micron-size platinum features by decomposition of spun-on metallo-organic film on quartz substrate. The role of laser power and energy density on the thermal decomposition of the film is studied using pulsed and cw laser irradiation. Transient reflectivity has been used as a probe to study the reaction steps involved in the decomposition of the metallo-organic containing film. Preliminary results on the use of the platinum features as seed layer for electroless copper plating is presented.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 75: Symposium B – Photon, Beam, and Plasma Stimulated Chemical Processes at Surfaces , 1986 , 83
Copyright
Copyright © Materials Research Society 1987

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References

1. Jan, R.Y. and Allen, S.D., Proc Soc. Photo-Opt. Instrum. Eng., 71, 459 (1984).Google Scholar
2. Dutta, S., McMullin, P.G., Rai-Choudhury, P., and Gallagher, B.D., Laser Chemical Processing of Semiconductor Devices, Extended Abstracts, p70, (Materials Research Society, Pittsburgh, 1984).Google Scholar
3. Fisanick, G.J., Hopkins, J.B., Gross, M.E., Fennell, M.D., and Schnoes, K.J., Appl. Phys. Letters, 46, 12 (1985).Google Scholar
4. Fisanick, G.J., Gross, M.E., Hopkins, J.B., Fennell, M.D., Schnoes, K.J. and Katzir, A., J. Appl. Phys., 57, 1139 (1985).CrossRefGoogle Scholar
5. Gross, M.E., Fisanick, G.J., Gallagher, P.K., Schnoes, K.J., and Fennell, M.D., Appl. Phys. Letters, 47, 9 (1985).Google Scholar
6. Houlding, V.H., Slattery, N.J., Beeson, K.W., and Frommer, J.E., Beam Induced Chemical Processes, Extended Abstracts, pp25, (Materials Research Society, Pittsburgh, 1985).Google Scholar
7. Milgram, A.A., J. Elecrochem. Soc., 118, 287 (1971).Google Scholar
8. Suzaki, Y. and Tachibana, A., Appl. Opt., 14, 2809 (1975).CrossRefGoogle Scholar
9. Murakami, K., Takita, K., and Masuda, K., Jap. J. Appl. Phys., 20, L013 (1981).Google Scholar
10. Bruines, J.J.P., van Hal, R.P.M., Boots, H.M.J., Polman, A., and Saris, F.W., Appl. Phys. Lett. 49, 1160 (1986).Google Scholar
11. Duley, W.W., Laser Processing and Analysis of Materials, p89, (Plenum, New York, 1983).Google Scholar