Hostname: page-component-78c5997874-4rdpn Total loading time: 0 Render date: 2024-11-09T22:29:57.500Z Has data issue: false hasContentIssue false
  • English
  • Français

Laser-Induced Surface Modification and Etching of Materials

Published online by Cambridge University Press:  26 February 2011

D. Bauerle ,
M. Eyett ,
U. Kolzer ,
R. Kullmer ,
P. Mogyorosi  and
K. Piglmayer
D. Bauerle
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitat Linz, A-4040 Linz, Austria
M. Eyett
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitat Linz, A-4040 Linz, Austria
U. Kolzer
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitat Linz, A-4040 Linz, Austria
R. Kullmer
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitat Linz, A-4040 Linz, Austria
P. Mogyorosi
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitat Linz, A-4040 Linz, Austria
K. Piglmayer
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitat Linz, A-4040 Linz, Austria
Get access

Abstract

Laser-induced surface reduction and ablation of piezoelectric oxides is described for the examples of BaTi03 and LiNb03.

The microscopic mechanisms involved in the laser-induced etching of single-crystal (100) Si in Cl2 atmosphere are investigated for the regime of low laser powers.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 101: Symposium B – Laser and Particle-Beam Chemical Processing for Microelectronics , 1987 , 411
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Bauerle, D., Chemical Processing with Lasers, Springer Series in Materials Science 1 (Springer-Verlag, Berlin, Heidelberg 1986).Google Scholar
2 Otto, J., Stumpe, R., and Bauerle, D., in Laser Processing and Diagnostics, edited by Bauerle, D., Springer Series in Chemical Physics 39, (Springer-Verlag, Berlin, Heidelberg, 1984), p. 320.Google Scholar
3 Kapenieks, A., Eyett, M., and Bauerle, D., Appl. Phys. A41, 331 (1986).Google Scholar
4 Eyett, M., Bauerle, D., wersing, W., Lubitz, K., and Thomann, H., Appl. Phys. A 40, 235 (1986).Google Scholar
5 Kapenieks, A., Stumpe, R., Eyett, M., and Bauerle, D., in Proc. IEEE Int. Symp. on Applications of Ferroelectrics (The American Ceramic Soc. 1986), p. 696; A. Kapenieks, M. Eyett, R. Stumpe, and D. Bauerle, in Laser Processing and Diagnostics II, edited by D. Bauerle, K.L. Kompa, and L. Laude (Les Editions de Physique, Les Ulis 1986), p. 165.Google Scholar
6 Eyett, M. and Bauerle, D., Ferroelectrics Lett. (1988).Google Scholar
7 Kolzer, U., Eyett, M., and Bauerle, D., to be published.Google Scholar
8 Landolt-Bornstein, Vol. 16, Ferroelectrics and Related Substances, edited by Hellwege, K.-H. and Hellwege, A.M. (Springer-Verlag Berlin, Heidelberg, New York 1981).Google Scholar
9 Eyett, M. and Bauerle, D., Appl. Phys. Lett., Dec. (1987).Google Scholar
10 Eyett, M. and Bauerle, D., to be published.Google Scholar
11 Wautelet, M. and Laude, L.D., Appl. Phys. Lett. 36, 197 (1980).Google Scholar
12 Itoh, N. and Nakayama, T., Phys. Lett. 92 A, 471 (1982).Google Scholar
13 Kullmer, R. and Bauerle, D., Appl. Phys. A 43, 227 (1987).Google Scholar
14 Mogyorosi, P., Piglmayer, K., Kullmer, R., and Bauerle, D., to be published in Appl. Phys. A.Google Scholar
15 Kullmer, R. and Bauerle, D., to be published in Appl. Phys. A.Google Scholar
16 Clyne, M.A.A. and Smith, D.J., J.C.S. Faraday II 75, 704 (1979); M.A.A. Clyne and D.H. Stedman, Trans. Faraday Soc. 64, 1816 (1968) and ibid., 64, 2698 (1968).Google Scholar