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Laser-Ablated Particles From Porous Silicon

Published online by Cambridge University Press:  21 February 2011

Hidehiko Nonaka  and
Shigeyuki Sekine
Hidehiko Nonaka
Affiliation:
Electrotechnical Laboratory, 1–1–4 Umezono, Tsukuba, Ibaraki 305 Japan
Shigeyuki Sekine
Affiliation:
Electrotechnical Laboratory, 1–1–4 Umezono, Tsukuba, Ibaraki 305 Japan
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Abstract

In order to search for the possibility to synthesize materials with new functions by laser deposition using source materials consisting of characterized microstructures, the porous silicon was ablated in ultrahigh vacuum with ultraviolet lasers of fluence as low as a few Jem”2. The ablated particles were analyzed by the time of flight method and the main species detected were atoms and small molecules such as Si, SÍ2, and SiO. The kinetics of the laser ablation of porous silicon in comparison with crystal silicon was also studied.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 354: Symposium A – Beam Solid Interactions for Materials Synthesis and Characterization , 1994 , 591
Copyright
Copyright © Materials Research Society 1995

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References

1 Kanai, M., Kawai, T., and Kawai, S., Appl. Phys. Lett. 58, 771 (1991).Google Scholar
2 Singh, R.K., Bhattacharya, D., and Narayan, J., Appl. Phys. Lett. 61, 483 (1992).Google Scholar
3 Cullis, A.G., Canham, L.T., and Dosser, O.D., Mat. Res. Soc. Symp. Proc., 256, 7 (1992).Google Scholar
4 Iwata, K., Hashimoto, A., Ohkubo, M., and Yamamoto, A., Proc. Appl. Phys. Soc. Jpn. Spring Meeting, 661, 29a-ZX-10 (1993) in Japanese.Google Scholar
5 JANAF Thermochemical Tables, ed.Stull, D.R. and Prophet, H., Nat. Stand. Ref. Data Ser., 37 (1971).Google Scholar
6 Canham, L.T., Houlton, M.R., Leong, W.Y., Pickering, C., and Keen, J.M., J. Appl. Phys. 70, 422 (1991).Google Scholar
7 Chrisey, D.B., Horwitz, J.S., and Leuchtner, R.E., Thin Solid Films, 206, 111 (1991).Google Scholar