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Laser Scribing of W-textured ZnO Substrates Using Green Laser

Published online by Cambridge University Press:  25 February 2013

Ryousuke Ishikawa ,
Hidetoshi Wada ,
Yasuyoshi Kurokawa ,
Porponth Sichanugrist  and
Makoto Konagai
Ryousuke Ishikawa
Affiliation:
Department of Physical Electronics, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro, Tokyo 152-8552, Japan
Hidetoshi Wada
Affiliation:
Department of Physical Electronics, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro, Tokyo 152-8552, Japan
Yasuyoshi Kurokawa
Affiliation:
Department of Physical Electronics, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro, Tokyo 152-8552, Japan
Porponth Sichanugrist
Affiliation:
Department of Physical Electronics, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro, Tokyo 152-8552, Japan
Makoto Konagai
Affiliation:
Department of Physical Electronics, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro, Tokyo 152-8552, Japan Photovoltaics Research Center (PVREC), Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro, Tokyo 152-8552, Japan
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Abstract

Thin-film silicon solar cells have been attracted a lot of intention as low-cost solar cells. One of the most important technologies for improving their performances is light trapping. We have demonstrated the high potential of double-textured zinc oxide (ZnO) thin films used as front transparent conductive oxide (TCO) films due to further enhancement of their light-trapping effects. Although the laser scribing method has already been well established for low-cost thin-film silicon solar cell module manufacturing, laser scribing technique on double-textured ZnO is new and still a challenging issue. In this study, we firstly demonstrated the availability of laser scribing for amorphous silicon (a-Si) solar cells fabricated on double-textured ZnO substrates. It is general to utilize lasers with wavelength of 1.06 μm and 532 nm for scribing of TCO and silicon layer, respectively. Here we attempted to scribe both of TCO and silicon layers using a 532 nm wavelength laser (green laser) for process simplifying.

Keywords

lasertransparent conductorphotovoltaic
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1493: Symposium E/H – Photovoltaic Technologies, Devices and Systems Based on Inorganic Materials, Small Organic Molecules and Hybrids , 2013 , pp. 207 - 212
Copyright
Copyright © Materials Research Society 2013 

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