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Laser Deposition and Patterning of High-Temperature Superconductors

Published online by Cambridge University Press:  21 February 2011

D. BÅuerle ,
J. Heitz ,
W. Ludorf ,
P. Schwab  and
X.Z. Wang
D. BÅuerle
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitát Linz, A-4040 Linz, Austria
J. Heitz
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitát Linz, A-4040 Linz, Austria
W. Ludorf
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitát Linz, A-4040 Linz, Austria
P. Schwab
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitát Linz, A-4040 Linz, Austria
X.Z. Wang
Affiliation:
Angewandte Physik, Johannes-Kepler-Universitát Linz, A-4040 Linz, Austria
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Abstract

Superconducting films of Y-Ba-Cu-O and Bi-Sr-Ca-Cu-O on (100) SrTiO3 and (100) MgO substrates have been fabricated by reactive excimer-laser sputtering from ceramic targets. Film patterning by laser-induced reduction/metallization, oxidation, and ablation has been investigated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 158: Symposium B – In-Situ Patterning: Selective Area Deposition and Etching , 1989 , 451
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

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