Hostname: page-component-745bb68f8f-kw2vx Total loading time: 0 Render date: 2025-01-27T15:39:29.884Z Has data issue: false hasContentIssue false
  • English
  • Français

Large Scale Ion Beam Equipment and Processing - Review of Ammtra Project -

Published online by Cambridge University Press:  22 February 2011

Koji Matsuda
Koji Matsuda*
Affiliation:
Advanced Material-Processing and Machining Technology Research Association (AMMTRA) (NISSIN ELECTRIC CO., LTD.), Osaka, JAPAN
Get access

Abstract

An R&D project of large scale ion beam equipment and processing is being carried out from 1986 till 1994. The project includes R&D of five ion beam systems and three material processes for surface modification. The five equipment R&D projects are:

(1)High current metal ion beam system,

(2)Integrated high current ion beam system,

(3)Ionized multiple beam system with high deposition rate,

(4)High energy ion beam system,

(5)Gas-phase focused ion beam system.

The three materials processing R&D projects are:

(1)Glass surface modification,

(2)Metal surface modification,

(3)Low scattering multilayer film deposition. This paper reviews recent progress on development of the project. This work was conducted in the program: ’Advanced Material Processing and Machining System’ consigned to AMMTRA from the New Energy and Industrial Technology Development Organization, which is carried out under the Industrial Science and Technology Frontier Program enforced by the Agency of Industrial Science and Technology of Japan.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 316: Symposium A – Materials Synthesis and Processing Using Ion Beams , 1993 , 611
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Advanced Material-Processing and Machining Technology Research Association, Sumitomo Seimei Shin-Osaka Building South Wing 10F, 5-5-15 Nishi-Nakajima, Yodogawa-ku, Osaka, 532 Japan.Google Scholar
2 Association member: Nissin Electric Co., Ltd.Google Scholar
3 lnami, H., Inouchi, Y., Tanaka, H., Yamashita, T., Matsunaga, K. and Matsuda, K., Proc.13th Symp. ISIAT’90, Tokyo, (1990)53.Google Scholar
4 lnami, H., Inouchi, Y., Tanaka, H., Yamashita, T., Matsunaga, K. and Matsuda, K., Nucl.Instr.Methods in Physics Res. B55, 370(1991).Google Scholar
5 Association member: ULVAC Japan, Ltd.Google Scholar
6 Association member: Mitsubishi Electric Co., Ltd.Google Scholar
7 Yamada, I., Palmstrom, C.J., Kennedy, E., Mayer, J.W., Inokawa, H. and Takagi, T., Mat. Res. Soc. Symp. Proc. 37, 401–406(1985).Google Scholar
8 Tsukazaki, H., Okamoto, G., Hashimoto, Y., Yamanishi, K., Tanaka, M. and Yasunaga, S., Mat. Res. Soc. Symp. Proc. 235, 615(1992).Google Scholar
9 Yamada, I., Takaoka, G.H., Usui, H., Satoh, F., Itoh, Y., Yamashita, K., Kitamoto, S., Namba, Y., Hashimoto, Y., Maeyama, Y. and Machida, K., Nucl.Instr.Methods in Physics Res. B55, 876(1991).Google Scholar
10 Kawagoe, Y., Yamanishi, K., Imada, K. and Sato, K., Nucl.Instr.Methods in Physics Res. B59/60, 1426(1991).Google Scholar
11 Association member: Hitachi, Ltd.Google Scholar
12 Association member: JEOL, Ltd.Google Scholar
13 Association member: Nippon Sheet Glass Co., Ltd.Google Scholar
14 Tagami, T., Oyoshi, K. and Tanaka, S., in Processing and Characterization of Materials Using Ion Beams, edited by Rehn, L.E., Green, J. and Smidt, S.A. (Mater.Res.Soc.Proc.l28, Pittsburgh, PA 1989)pp.519–524.Google Scholar
15 Oyoshi, K.,Tagami, T. and Tanaka, S., Nucl.Instr.Methods in Physics Res. B59/60, 1324(1991).Google Scholar
16 Oyoshi, K.,Tagami, T. and Tanaka, S., J.Appl.Phys. 68, 3653(1990).Google Scholar
17 Association member: Kobe Steel, Ltd.Google Scholar
18 Association member: Japan Aviation Electronics Industries, Ltd.Google Scholar