Hostname: page-component-586b7cd67f-rdxmf Total loading time: 0 Render date: 2024-11-28T07:44:24.262Z Has data issue: false hasContentIssue false
  • English
  • Français

Investigation of Wear of Microelectromechanical Contacts

Published online by Cambridge University Press:  10 February 2011

Brian J. Gally ,
C. Cameron Abnet  and
Stuart Brown
Brian J. Gally
Affiliation:
Exponent Failure Analysis Associates, Natick, MA 01760
C. Cameron Abnet
Affiliation:
Exponent Failure Analysis Associates, Natick, MA 01760
Stuart Brown
Affiliation:
Exponent Failure Analysis Associates, Natick, MA 01760
Get access

Abstract

A test system has been assembled to examine factors controlling the reliability of microdevice switching. The system consists of a spherically tipped sputter-coated post driven by a piezoresistive actuator into a sputter-coated micromechanical membrane. Contact forces are calculated based upon the measured deflection of the micromechanical membrane, which is induced by post actuation. Membrane deflection is measured using white light interferometry. The known geometry of the membrane and probe tip permits the estimation of contact area and, hence, contact pressure. Preliminary testing of sputtered gold contacts resulted in localized melting, material transport to the membrane and failure of contact surfaces at relatively low contact pressures and current densities. Further testing will examine the factors governing the reliability of microdevice contacts, such as material properties, contact pressure and current density.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 605: Symposium MM – Materials Science of Microelectromechanical Systems Devices II , 1999 , 117
Copyright
Copyright © Materials Research Society 2000

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Miles, M. W., SID 1997 Digest, Session 7.3Google Scholar
2. Hornbeck, L. J., International Electron Devices Technical Digest, p. 15.1.1, (1993).Google Scholar
3. Freeman, D. M. and Davis, C. Q., Proceedings, IEEE/LEOS Summer Topical Meeting, Optical MEMS, Monterey CA, p. 9–10, July 20-22, (1998).Google Scholar
4. Hyman, D., presented at the 1999 IEEE Symposium on Microwave Electronics, Anaheim, CA, 1999 (unpublished).Google Scholar
5. Majumder, S., McGruer, N.E., Zavracky, P.M., Adams, G.G., Morrison, R.H., and Krim, J., Proceedings of the 44th IEEE Holm Conference on Electrical Contacts, Washington, D.C., p. 127–132, (1998).Google Scholar
6. Electrical Contacts, Principles and Applications, edited by Slade, P. G. (Marcel Dekker, Inc., 1999).Google Scholar
7. Jones, F. Liewellyn in The Physics of Electrical Contacts (Oxford:Clarendon Press, 1957).Google Scholar
8. Holm, Ragnar, Electric Contact, Theory and Application (Springer-Verlag, New York, 1967).Google Scholar