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Investigation of PZT//LSCO/IPT//Aerogel Thin Film Composites for Uncooled Pyroelectric Ir Detectors

Published online by Cambridge University Press:  10 February 2011

P.G. Clem ,
B.A. Tuttle ,
J.A. Ruffner ,
C.J. Brinker ,
R.W. Schwartz ,
M. Rodriguez  and
W.L. Warren
P.G. Clem
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
B.A. Tuttle
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
J.A. Ruffner
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
C.J. Brinker
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
R.W. Schwartz
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
M. Rodriguez
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
W.L. Warren
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
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Abstract

A monolithic thin film structure for uncooled pyroelectric infrared detector arrays was developed to integrate thermally isolated Pb(Zr,Ti)O3-based thin films on silicon, with a low thermal conductivity, aerogel thin film interlayer. Aerogel thin films of 0.4-1.2μm thickness and 70-85% porosity were deposited on silicon substrates by dip coating to form a thermal isolation layer. 200-400nm thick Pb(Zr0.4Ti0.6)O3 films deposited on (La,Sr)CoO3[LSCO]//Pt electrodes atop these aerogel films displayed a remanent polarization Pr = 28μ C/cm2, pyroelectric coefficient p = 30 nC/cm2K, and calculated noise equivalent temperature difference NETD = 0.07°C. Processing of Pb(Zr,Ti)O3 thin films atop the aerogel interlayer structure required modifications to deposition and heat treatment methods to minimize tensile stress accumulation. Effects of thermal processing and thin film stress state on ferroelectric properties are also reported.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 541: Symposium O – Ferroelectric Thin Films VII , 1998 , 661
Copyright
Copyright © Materials Research Society 1999

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References

REFERENCES

1. Kulwicki, B.M., Amin, A., Beratan, H.R., and Hanson, C.H., “Pyroelectric Imaging,” Proc. 8th IEEE ISAF, pp. 1–11 (1992).Google Scholar
2. Kruse, P. W., “Uncooled Infrared Focal Plane Arrays,” Proc. 9th IEEE ISAF, pp. 643–646 (1994).Google Scholar
3. Shorrocks, N.M., Patel, A., Beanland, R., and Stringfellow, S.B., “Integration of Pyroelectric Films with CMOS Circuits for IR Imaging,” presented at ISIF 1997, Santa Fe, NM.Google Scholar
4. Cole, B.E. et al. , “High Performance Infrared Detector Arrays using Thin Film Microstructures,” Proc. 9th IEEE ISAF, pp. 653–656 (1994).Google Scholar
5. Bell, A. et al. , “PbTiO3 Thin Films for Pyroelectric Detection,” Proc. 9th IEEE ISAF, pp. 643–646 (1994).Google Scholar
6. Scheuerpflug, P., Hauck, M., and Fricke, J., “Thermal Properties of Silica Aerogels Between 1.4 and 330K,” J. Non-Cryst. Solids, 145, 196 (1992).Google Scholar
7. Brinker, C.J. and Scherer, G.W., Sol-gel Science, Academic Press, New York (1990).Google Scholar
8. Prakash, S.S., Brinker, C.J., Hurd, A. J., and Rao, S.M., “Ambient Pressure Silica Aerogel Films,” in Advances in Porous Materials, edited by Komarneni, S., Smith, D.M., and Beck, J.S., Mater. Res. Soc. Symp. Proc. 371, 205–209 (1995).Google Scholar
9. Schwartz, R.W., Assink, R.A., and Headley, T.J., “Spectroscopic and Microstructural Characterization of Solution Chemistry Effects in PZT Thin Film Processing,” in Ferroelectric Thin Films II, edited by Tuttle, B.A., Desu, S.B., Ramesh, R., and Shiosaki, T., Mater. Res. Soc. Symp. Proc. 361, 377–387 (1995).Google Scholar
10. Holmes, A.S. et al. , “Fabrication of buried channel waveguides on silicon substrates using spin-on glass”, Applied Optics 32(25), 4916 (1993).Google Scholar
11. Tuttle, B.A., Voight, J.A., Goodnow, D.D., Lamppa, D.L., Headley, T.J., Eatough, M.O., Zender, G., Nasby, R.D., and Rodgers, S.M., “Highly Oriented, Chemically Prepared Pb(Zr,Ti)O3 Thin Films,” J. Am. Ceram. Soc. 76(6), 1537 (1989).Google Scholar