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Investigating GaSb(001) Dry Etching by ICP-RIE on a non-Silicon Containing Sample Holder with no Organic Gases

Published online by Cambridge University Press:  18 April 2012

Hamad A. Albrithen ,
Gale S. Petrich ,
Leslie A. Kolodziejski ,
Abdelmajid Salhi  and
Abdulrahman A. Almuhanna
Hamad A. Albrithen*
Affiliation:
Physics and Astronomy, KAIN, King Saud University, Riyadh, Riyadh, Saudi Arabia.
Gale S. Petrich
Affiliation:
Research Laboratory of Electronics, MIT, Cambridge, Massachusetts.
Leslie A. Kolodziejski
Affiliation:
Department of Electrical Engineering and Computer Science, MIT, Cambridge, Massachusetts.
Abdelmajid Salhi
Affiliation:
National Center for Nano Technology Research, King Abdulaziz City for Science and Technology, Riyadh, Riyadh, Saudi Arabia.
Abdulrahman A. Almuhanna
Affiliation:
National Center for Nano Technology Research, King Abdulaziz City for Science and Technology, Riyadh, Riyadh, Saudi Arabia.
*
*Email: [email protected]
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Abstract

We report the dry etch of GaSb(001) by inductively coupled plasma reactive ion etcher. Silicon Oxide, deposited by PECVD, was used as a mask. The oxide layer proved to be almost unaffected compared to the GaSb, when using chlorine compound gases as etchants (Cl2, BCl3, and SiCl4) as well as argon. This provides high selectivity for GaSb to the mask layer. The sample holder has no silicon that may contribute to the etching process. Etching using Cl2 + Ar showed increase in the etching rate as the chlorine ratio increases; however, the process led to grassy surface and chemical like reaction. The use of SiCl4+Cl2+Ar mixture with low chlorine ratio resulted in anisotropic etch with smooth sides. It has been found for this case that the increase of the chlorine ratio led to an increased etching rate as well. The repeat of previously reported result by Swaminathan et al. [Thin Solid Films 516 (2008) 8712.] yet with a sample holder not having silicon, proved the effect of Si-contribution in producing vertical profile etch with smooth surfaces.

Keywords

SbIII-Vplasma-enhanced CVD (PECVD) (chemical reaction)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1396: Symposium O – Compound Semiconductors for Generating, Emitting and Manipulating Energy , 2012 , mrsf11-1396-o07-33
Copyright
Copyright © Materials Research Society 2012

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References

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