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Integration of microcatalysts on thin membrane for thermoelectric gas sensor devices

Published online by Cambridge University Press:  01 February 2011

Yeongsoo Choi ,
Woosuck Shin ,
Kazuki Tajima ,
Noriya Izu ,
Ichiro Matsubara  and
Norimitsu Murayama
Yeongsoo Choi
Affiliation:
National Institute of Advanced Industrial Science and Technology, Nagoya 463–8560, Japan
Woosuck Shin
Affiliation:
National Institute of Advanced Industrial Science and Technology, Nagoya 463–8560, Japan
Kazuki Tajima
Affiliation:
National Institute of Advanced Industrial Science and Technology, Nagoya 463–8560, Japan
Noriya Izu
Affiliation:
National Institute of Advanced Industrial Science and Technology, Nagoya 463–8560, Japan
Ichiro Matsubara
Affiliation:
National Institute of Advanced Industrial Science and Technology, Nagoya 463–8560, Japan
Norimitsu Murayama
Affiliation:
National Institute of Advanced Industrial Science and Technology, Nagoya 463–8560, Japan
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Abstract

Dispenser technique was employed to integrate the Pt loaded on alumina (Pt/alumina) micro-catalysts on thin membrane of micro-thermoelectric hydrogen sensor (μ-THS). The μ-THS with Pt loaded alumina showed higher sensing performance than bulk-type THS with Pt thin film prepared by RF sputtering method. For the μ-THS with Pt/alumina catalyst, its voltage signal was 7.3 mV for hydrogen concentration of 1 % in dry air at catalyst temperature of 100 °C. In the case of the bulk-type THS with Pt thin film catalysts, the voltage signal was 0.33 mV under the same condition.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 828: Symposium A – Semiconductor Materials for Sensing , 2004 , A7.3
Copyright
Copyright © Materials Research Society 2005

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References

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