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Integrating Biomaterials into Microsystems: Formation and Characterization of Nanostructured Titania

Published online by Cambridge University Press:  15 March 2011

Zuruzi Abu Samah ,
Blaine C. Butler ,
Emily R. Parker ,
Ayesha Ahmed ,
Heather M. Evans ,
Cyrus R. Safinya  and
Noel C. MacDonald
Zuruzi Abu Samah
Affiliation:
Materials Department, and Mechanical and Environmental Engineering Department, University of California at Santa Barbara, California, CA 93106, U. S. A
Blaine C. Butler
Affiliation:
Materials Department, Physics Department, and Biomolecular Science and Engineering Program, University of California at Santa Barbara, CA 93106, U. S. A
Emily R. Parker
Affiliation:
Materials Department, and Mechanical and Environmental Engineering Department, University of California at Santa Barbara, California, CA 93106, U. S. A
Ayesha Ahmed
Affiliation:
Materials Department, Physics Department, and Biomolecular Science and Engineering Program, University of California at Santa Barbara, CA 93106, U. S. A
Heather M. Evans
Affiliation:
Materials Department, Physics Department, and Biomolecular Science and Engineering Program, University of California at Santa Barbara, CA 93106, U. S. A
Cyrus R. Safinya
Affiliation:
Materials Department, Physics Department, and Biomolecular Science and Engineering Program, University of California at Santa Barbara, CA 93106, U. S. A
Noel C. MacDonald
Affiliation:
Materials Department, and Mechanical and Environmental Engineering Department, University of California at Santa Barbara, California, CA 93106, U. S. A
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Abstract

We demonstrate the facile fabrication of crack-free nanostructured crystalline titania into microsystems. Titania layers were formed by reacting Ti thin films, deposited by evaporation and sputtering, with aqueous H202. Cracks were observed in titania layers formed on blanket Ti films but absent on arrays of patterned Ti pads below a threshold dimension. Nanostructured titania formed from sputtered and evaporated Ti films consists of aligned fibrous and sponge-like nanoporous morphologies, respectively. Rat fibroblasts L-cells cultured on these titania fibers remain viable up to 3 days. These observations demonstrate the feasibility of this technique to integrate nanostructured titania into Nano|Micro-Electromechanical systems (N|MEMS) devices.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 820: Symposia O/R – Nanoengineered Assemblies and Advanced Micro/Nanosystems , 2004 , O9.4
Copyright
Copyright © Materials Research Society 2004

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