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In-Situ TEM Observations of Surface Roughening and Defect Formation in Lattice Mismatched Heteroepitaxial Thin Films

Published online by Cambridge University Press:  10 February 2011

Cengiz S. Ozkan ,
William D. Nix  and
Huajian Gao
Cengiz S. Ozkan
Affiliation:
Electrical and Computer Engineering Department, University of California at San Diego
William D. Nix
Affiliation:
Materials Science and Engineering Department, Stanford University
Huajian Gao
Affiliation:
Mechanical Engineering Department, Stanford University
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Abstract

This paper focuses on in-situ transmission electron microscopy observations of surface roughening and defect formation in heteroepitaxial Sil−xGex thin films. Annealing experiments have been carried out in-situ in the microscope under a high vacuum environment. We comment on the sample preparation procedure for in-situ TEM experiments and explain the importance of having a sufficiently thick sample to have the stress state in the film unaltered. Experimental results of in-situ surface roughening are presented for suberitically and supercritically thick Sil−xGex films. We found that, in a vacuum environment, the kinetics of surface roughening and the resulting surface morphology are much different than in a hydrogen environment.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 505 , 1997 , 291
Copyright
Copyright © Materials Research Society 1998

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References

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