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In-Situ Quality Control of the Production of Semiconductor Devices by Microwave Photoconductivity Measurements
Published online by Cambridge University Press: 25 February 2011
Abstract
The application of transient photoconductivity measurements in the microwave frequency range to the characterization of semiconductors and semiconductor devices is analyzed. Quality control and in-situ optimization are discussed from a more general point of view and as a concrete example the optimization of the deposition of amorphous silicon films is presented.
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- Research Article
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- Copyright © Materials Research Society 1992
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