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In situ RHEED Monitoring of Epitaxial Film Growth on Continuously Moving Tape

Published online by Cambridge University Press:  11 June 2019

Vladimir Matias  and
Ruud Steenwelle
Vladimir Matias
Affiliation:
Superconductivity Technology Center Los Alamos National Laboratory
Ruud Steenwelle
Affiliation:
Superconductivity Technology Center Los Alamos National Laboratory
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Abstract

Format

This is a copy of the slides presented at the meeting but not formally written up for the volume.

Abstract

We describe high-throughput experimentation of epitaxial oxide film growth by means of in situ monitoring. Ion beam assisted deposition is used to create a biaxially aligned crystalline template for epitaxial film growth on a flexible metal tape. Metal tape is fed continuously in a reel-to-reel transport system inside the vacuum deposition chamber. Long length of tape is used for sequential combinatorial experiments of epitaxial growth. We utilize in situ reflection high energy electron diffraction (RHEED) for high-throughput analysis of samples. We describe the techniques and the methodology that we developed for this experimental system. This work is supported by the Department of Energy Office of Electricity Delivery & Energy Reliability.

Keywords

combinatorial synthesision-beam assisted deposition
Type
Slide Presentations
Information
MRS Online Proceedings Library (OPL) , Volume 967: Symposium U – Solution Processing of Inorganic and Hybrid Materials for Electronics and Photonics , 2006 , 967-U03-06
Copyright
Copyright © Materials Research Society 2006

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