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In Situ Investigation of Crystallization Kinetics in Pzt Films by Light Scattering

Published online by Cambridge University Press:  10 February 2011

V.YA. Shur ,
S.A. Negashev ,
A.L. Subbotin ,
E.A. Borisova  and
S. Trolier-Mckinstry
V.YA. Shur
Affiliation:
Institute of Physics and Applied Mathematics, Ural State University, Lenin Ave.51, 620083 Ekaterinburg, Russia, [email protected]
S.A. Negashev
Affiliation:
Institute of Physics and Applied Mathematics, Ural State University, Lenin Ave.51, 620083 Ekaterinburg, Russia, [email protected]
A.L. Subbotin
Affiliation:
Institute of Physics and Applied Mathematics, Ural State University, Lenin Ave.51, 620083 Ekaterinburg, Russia, [email protected]
E.A. Borisova
Affiliation:
Institute of Physics and Applied Mathematics, Ural State University, Lenin Ave.51, 620083 Ekaterinburg, Russia, [email protected]
S. Trolier-Mckinstry
Affiliation:
Intercollege Material Research Laboratory, The Pennsylvania State University, University Park, PA 16802
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Abstract

This paper presents the in situ investigation of the crystallite evolution/growth during annealing of amorphous sol-gel Pb(Zr,Ti)O3 thin films by elastic light scattering. XRD and SEM measurements of partly crystallized films of crystallite evolution were used for verifying the method.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 433: Symposium T – Ferroelectric Thin Films V , 1996 , 351
Copyright
Copyright © Materials Research Society 1996

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References

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