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In Situ FT-IR Studies of Oxide and Oxynitride Sol-Gel-Derived Thin Films*

Published online by Cambridge University Press:  15 February 2011

David M. Haaland  and
C. Jeffrey Brinker
David M. Haaland
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
C. Jeffrey Brinker
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
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Abstract

A high-temperature infrared cell was developed to study the gel-to-glass conversion of sol-gel-derived thin films. FT-IR spectra of matched thin-film borosilicate sol-gel samples were taken as the samples were heated at 100°C intervals to 700°C in either air or ammonia. The gels were converted to oxide and oxynitride glasses, respectively, by these heat treatments. The gel-to-glass conversion could be followed and compared for these two treatments by monitoring changes in the vibrational bands present in the spectra. Comparisons between the infrared spectra of NH3-treated and air-treated films heated above 500°C reveal the appearance of new B-N bonds at the expense of B-O-Si bonds for the NH3-fired films. These spectra also exhibit changes which may indicate the formation of Si-N bonds. Thus, ammonolysis reactions can result in thin-film oxynitride glass formation at relatively low temperatures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 32: Symposium B – Better Ceramics Through Chemistry I , 1984 , 267
Copyright
Copyright © Materials Research Society 1984

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Footnotes

*

This work performed at Sandia National Laboratories supported by the U.S. Department of Energy under Contract Number DE-AC04-76DP00789.

References

REFERENCES

1. Loehman, R. E., J. Am. Ceram. Soc. 62, 491 (1979).CrossRefGoogle Scholar
2. Elmer, T. H. and Nordberg, M. E., J. Am. Ceram. Soc. 50, 275 (1967).CrossRefGoogle Scholar
3. Elmer, T. H. and Nordberg, M. E., Proc. VII International Congress on Glass, Brussels, Belgium, Paper No. 30 (1965).Google Scholar
4. Jankowski, P. E. and Risbud, S. H., J. Am. Ceram. Soc. 63, 350 (1980).CrossRefGoogle Scholar
5. Loehman, R. E., J. Non-Cryst. Solids 42, 433 (1980).CrossRefGoogle Scholar
6. Brinker, C. J. and Haaland, D. M., J. Am. Ceram. Soc. 66, 758 (1983).CrossRefGoogle Scholar
7. Brinker, C. J., Haaland, D. M., and Loehman, R. E., J. Non-Cryst. Solids 56, 179 (1983).CrossRefGoogle Scholar
8. Brinker, C. J., J. Am. Ceram. Soc. 65, C–4 (1982).CrossRefGoogle Scholar
9. Tenney, A. S. and Wong, J., J. Chem. Phys. 56, 5516 (1972).CrossRefGoogle Scholar
10. Taft, E. A., J. Electrochem. Soc. 118, 1985 (1971).CrossRefGoogle Scholar
11. Bertoluzza, A., Fagnano, C., Morelli, M. A., Gottardi, V., and Gugielmi, M., J. Non-Cryst. Solids 48, 117 (1982).CrossRefGoogle Scholar
12. Smith, A. L., Spectrochim. Acta 16, 87 (1960).CrossRefGoogle Scholar
13. Decottignics, M., Phalippou, J. and Zarzycki, J., J. Mat. Sci. 13, 2605 (1978).CrossRefGoogle Scholar
14. Pert, J. B., J. Phys. Chem. 70, 2937 (1966).CrossRefGoogle Scholar
15. Cant, N. W. and Little, L. H., Can. J. Chem. 42, 802 (1964).CrossRefGoogle Scholar
16. Habraken, F.H.P.M., Kuiper, A.E.T., and Tamminga, Y., J. Appl. Phys. 53, 6996 (1982).CrossRefGoogle Scholar