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Hydrogen Passivation of Shallow Dopants in Indium Doped Bulk CdTe
Published online by Cambridge University Press: 26 February 2011
Abstract
Hydrogen passivation effects in In doped n-CdTe upon exposure to rf hydrogen plasma have been studied by electrical and photoluminescence measurements. Shallow dopant passivation of approximately an order of magnitude at 150°C and 50% at 170°C is observed. No visual damage is seen. Reverse bias annealing effects are also studied. Results are discussed.
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- Copyright © Materials Research Society 1995
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