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Hydrogen Diffusion and Passivation in InGaAIN Alloys
Published online by Cambridge University Press: 26 February 2011
Abstract
Hydrogen is found to readily diffuse into InGaN, InAIN and InGaAIN epitaxial layers during plasma exposures at 170 – 250 °C for 40 sec - 30 min. The diffusivity of hydrogen is > 10−11 cm2-s−1 at 170 °C, and the native donor species are passivated by association with the hydrogen. Reactivation of these species occurs at 450–500°C, but the hydrogen remains in the material until ≥ 800 °C.
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- Copyright © Materials Research Society 1995