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High-Throughput Measurement of Magnetostriction Using MEMS and Composition Spreads

Published online by Cambridge University Press:  26 February 2011

Noble C. Woo ,
Bryan G. Ng  and
R. B. van Dover
Noble C. Woo
Affiliation:
[email protected], Cornell University, Department of Chemistry and Chemical Biology, 214 Bard Hall, Ithaca, NY, 14853, United States, 607 254 5191, 607 254 5191
Bryan G. Ng
Affiliation:
[email protected], Cornell University, Department of Materials Science & Engineering, United States
R. B. van Dover
Affiliation:
[email protected], Cornell University, Department of Materials Science & Engineering, United States
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Abstract

While measurement of magnetostriction in bulk materials is readily accomplished using a strain gauge, measurement of this quantity for thin films presents a greater challenge, and typically involves measurement of the overall wafer curvature (for a film of uniform composition) as a function of field. In order to evaluate magnetostriction locally in composition-spread samples, we have developed a method using a dense array of pre-fabricated cantilever beams on a silicon substrate prepared using MEMS techniques. Differential strain in the thin film/cantilever system results in curvature which is detected using an optical (laser/position-sensitive-detector) system. A magnetic field is applied using two orthogonal Helmholtz coils, and the resulting deflection-field curves are used to determine the saturation magnetostriction λs as well as dλ/dH. Our composition-spread films are prepared using a three gun on-axis magnetron cosputtering system. The position-dependent composition is inferred using rate calibrations and verified with electron microprobe and Rutherford Backscattering Spectroscopy. Preliminary experiments have validated the technique and the system has been used to measure magnetostriction in the Ni-Fe system. Our approach can also be used to measure properties of giant magnetostrictive materials (e.g. TbFe/Fe multilayers) as a function of layer thicknesses, or thin film shape-memory alloys, including magnetic shape-memory alloys.

Keywords

combinatorial synthesisferromagneticstress/strain relationship
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 894: Symposium LL – Combinatorial Methods and Informatics in Materials Science , 2005 , 0894-LL07-03
Copyright
Copyright © Materials Research Society 2006

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References

REFERENCES

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