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Highly Transparent and High Haze ZnO:Al film For Front TCO of a-Si:H and μc-Si:H Solar Cells by Controlling Oxygen Flow

Published online by Cambridge University Press:  31 January 2011

Dong-Won Kang ,
Seung-Hee Kuk ,
Kwang-Sun Ji ,
Seh-Won Ahn  and
Min-Koo Han
Dong-Won Kang
Affiliation:
[email protected], Seoul National University, Seoul, Korea, Republic of
Seung-Hee Kuk
Affiliation:
[email protected], Seoul National University, Seoul, Korea, Republic of
Kwang-Sun Ji
Affiliation:
[email protected], SE group, LGE Advanced Research, Seoul, Korea, Republic of
Seh-Won Ahn
Affiliation:
[email protected], LGE Advanced Research, SE group, Seoul, Korea, Republic of
Min-Koo Han
Affiliation:
[email protected], Seoul National University, Seoul, Korea, Republic of
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Abstract

We fabricated highly transparent and high haze ZnO:Al film for front TCO of amorphous and microcrystalline silicon solar cells. We have sputtered ZnO:Al film of 1.3 μm on the thin seed layer of about 60nm which was previously sputtered on the glass substrate by using 4% dilution of oxygen to argon gas. The ZnO:Al film grown on the seed layer had much higher crystalline phase than one without any seed layer. Our bi-layer ZnO:Al film showed low resistivity of 2.66×10-4 Ω•cm and sheet resistance of 2.08 Ω/⇐ while conventional ZnO:Al film showed resistivity of 3.24×10-4 Ω•cm and sheet resistance of 2.46 Ω/⇐. After surface texturing by 0.5% HCl wet-chemical etching, the transmittance of ZnO:Al film was increased from 83.7% to 88.1% at wavelength of 550nm through the seed layer. Also the transmittance at 800nm was increased from 82.3% to 88.9%. Especially, haze values of the ZnO:Al film were drastically increased from 58.7% to 90.6% at wavelength of 550nm by employing the seed layer. Also haze values at 800nm were increased from 22.1% to 68.1%. It is expected that the seed layer method to improve the quality of ZnO:Al film will contribute to an increase of solar cell efficiency due to the high capability of light trapping and low electrical resistivity.

Keywords

optoelectronictransparent conductorphotovoltaic
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1153: Symposium A – Amorphous and Polycrystalline Thin Film Silicon Science and Technology–2009 , 2009 , 1153-A07-19
Copyright
Copyright © Materials Research Society 2009

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