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High Temperature Phases of Nanostructured Tungsten Oxide for Gas Sensing Applications

Published online by Cambridge University Press:  01 February 2011

Andrea Ponzoni ,
Elisabetta Comini ,
Matteo Ferroni ,
Guido Faglia  and
Giorgio Sberveglieri
Andrea Ponzoni
Affiliation:
[email protected], CNR-INFM SENSOR Lab, Brescia University, Chem. and Phys. Dept., Via Valotti 9, Brescia, Italy, 25133, Italy, +39 030 3715707, +39 030 - 2091271
Elisabetta Comini
Affiliation:
[email protected], CNR-INFM SENSOR Lab, Brescia University, Chem. and Phys. Dept., Via Valotti 9, BRESCIA, ITALY, 25133, Italy
Matteo Ferroni
Affiliation:
[email protected], CNR-INFM SENSOR Lab, Brescia University, Chem. and Phys. Dept., Via Valotti 9, BRESCIA, ITALY, 25133, Italy
Guido Faglia
Affiliation:
[email protected], CNR-INFM SENSOR Lab, Brescia University, Chem. and Phys. Dept., Via Valotti 9, BRESCIA, ITALY, 25133, Italy
Giorgio Sberveglieri
Affiliation:
[email protected], CNR-INFM SENSOR Lab, Brescia University, Chem. and Phys. Dept., Via Valotti 9, BRESCIA, ITALY, 25133, Italy
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Abstract

WO3 layers have been synthesized by thermal evaporation at high temperature in order to induce the crystallization of stable films. Phase stability has been proved by annealing treatments carried out at different temperatures. Annealing effects on gas sensing performances have been explained in terms of crystallinity degree and grain coarsening phenomena.

Keywords

physical vapor deposition (PVD)Wnanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 915: Symposium R – Nanostructured Materials and Hybrid Composites for Gas Sensors and Biomedical Applications , 2006 , 0915-R07-07
Copyright
Copyright © Materials Research Society 2006

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