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A High Stability Electrode Technology for Stacked SrBi2Ta2O2 Capacitors
Published online by Cambridge University Press: 10 February 2011
Abstract
A high stability electrode technology with TaSiN as a barrier metal was used to fabricate a stacked SBT capacitor array on polySi plugs, and hysteresis characteristics and contact properties of the stacked capacitor were studied.
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- Copyright © Materials Research Society 1999
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