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High Resolution X-Ray Diffraction Analysis of Piezoelectric LiNbO3 Films.

Published online by Cambridge University Press:  15 February 2011

Yoshihiko Shibata ,
Naohiro Kuze ,
Masahiro Matsui ,
Masaki Kanal  and
Tomoji Kawai
Yoshihiko Shibata
Affiliation:
Central Laboratory, Asahi Chemical Industry Co., Ltd. Samejima, Fuji, Shizuoka, 416, Japan
Naohiro Kuze
Affiliation:
Central Laboratory, Asahi Chemical Industry Co., Ltd. Samejima, Fuji, Shizuoka, 416, Japan
Masahiro Matsui
Affiliation:
Central Laboratory, Asahi Chemical Industry Co., Ltd. Samejima, Fuji, Shizuoka, 416, Japan
Masaki Kanal
Affiliation:
The Institute of, Scientific and Industrial Research, Osaka University, Mihogaoka, Ibaraki, Osaka, 567, Japan
Tomoji Kawai
Affiliation:
The Institute of, Scientific and Industrial Research, Osaka University, Mihogaoka, Ibaraki, Osaka, 567, Japan
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Abstract

Thin LINbO3 films are deposited on (001) sapphire and (001) LiTaO3 substrates by using pulsed excimer-laser ablation. These films are evaluated by high-resolution X-ray diffraction (HRXRD) analysis. Strained LiNbO3 films in which the a-axis is longer and the c-axis is shorter than those of LiNbO3 single crystals are deposited on the sapphire substrates. On the other hand, extremely high-quality LiNbO3 films in which the a-axis of the films is the same as that of substrates are grown on the LiTaO substrates. X-ray rocking curves for the (006) reflection showed very narrow full width at half maximum (FWHM) of 208 arcsec for the films on the sapphire substrates, and 9 arcsec for the films on LiTaO3 substrates.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 401: Symposium G – Epitaxial Oxide Thin Films II , 1995 , 273
Copyright
Copyright © Materials Research Society 1996

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